JPH0174267U - - Google Patents
Info
- Publication number
- JPH0174267U JPH0174267U JP1987167938U JP16793887U JPH0174267U JP H0174267 U JPH0174267 U JP H0174267U JP 1987167938 U JP1987167938 U JP 1987167938U JP 16793887 U JP16793887 U JP 16793887U JP H0174267 U JPH0174267 U JP H0174267U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- fan
- cover
- exhaust fan
- housed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006837 decompression Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Description
第１図は、本考案の一実施例のエツチング装置
の排気ユニツトを説明する図、第２図は、本考案
の第２の実施例のエツチング装置の排気ユニツト
を説明する図、第３図は、従来のエツチング装置
の構成とレイアウトを説明する平面図、第４図は
、従来のエツチング装置の構成とレイアウトを説
明する側面図である。
１……ロータリーポンプ、２……メカニカルプ
ースターボンプ、４……送風用フアン、５……排
気用フアン、６……カバー、７……排気ダクト、
８……配管。
FIG. 1 is a diagram illustrating an exhaust unit of an etching apparatus according to an embodiment of the present invention, FIG. 2 is a diagram illustrating an exhaust unit of an etching apparatus according to a second embodiment of the present invention, and FIG. , a plan view illustrating the configuration and layout of a conventional etching apparatus, and FIG. 4 a side view illustrating the configuration and layout of a conventional etching apparatus. 1... Rotary pump, 2... Mechanical booster pump, 4... Ventilation fan, 5... Exhaust fan, 6... Cover, 7... Exhaust duct,
8...Piping.
Claims (1)
アンと排気用フアンを有するカバー内に収納し、
前記排気用フアンを排気ダクトに連結したことを
特徴とする減圧処理装置。 An exhaust unit for rough evacuation of the decompression processing chamber is housed in a cover having a blower fan and an exhaust fan,
A depressurization processing apparatus characterized in that the exhaust fan is connected to an exhaust duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167938U JPH0174267U (en) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167938U JPH0174267U (en) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174267U true JPH0174267U (en) | 1989-05-19 |
Family
ID=31456680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167938U Pending JPH0174267U (en) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174267U (en) |
-
1987
- 1987-11-04 JP JP1987167938U patent/JPH0174267U/ja active Pending