JPS6199694U - - Google Patents

Info

Publication number
JPS6199694U
JPS6199694U JP18464584U JP18464584U JPS6199694U JP S6199694 U JPS6199694 U JP S6199694U JP 18464584 U JP18464584 U JP 18464584U JP 18464584 U JP18464584 U JP 18464584U JP S6199694 U JPS6199694 U JP S6199694U
Authority
JP
Japan
Prior art keywords
turbo
molecular pump
leak valve
evacuated chamber
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18464584U
Other languages
Japanese (ja)
Other versions
JPH018714Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18464584U priority Critical patent/JPH018714Y2/ja
Publication of JPS6199694U publication Critical patent/JPS6199694U/ja
Application granted granted Critical
Publication of JPH018714Y2 publication Critical patent/JPH018714Y2/ja
Expired legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す構成略図、第
２図はその動作を説明するための図、第３図は本
考案の他の実施例を示す構成略図、第４図ａ乃至
第４図ｃはターボ分子ポンプ内の圧力の変化を示
すグラフ、第５図ａ及びｂは本考案の他の実施例
における動作を説明するための図である。 １：被排気室、２：ターボ分子ポンプ、３，４
：排気管、５：油回転ポンプ、６：ポンプ電源、
７：リーク弁、８：駆動回路、９：パルス発生回
路、１０：真空計、１１：制御回路。 FIG. 1 is a schematic diagram showing the configuration of one embodiment of the present invention, FIG. 2 is a diagram for explaining its operation, FIG. 3 is a schematic diagram of the configuration showing another embodiment of the present invention, and FIGS. FIG. 4c is a graph showing changes in pressure within the turbomolecular pump, and FIGS. 5a and 5b are diagrams for explaining the operation of another embodiment of the present invention. 1: Evacuated chamber, 2: Turbo molecular pump, 3, 4
: Exhaust pipe, 5: Oil rotary pump, 6: Pump power supply,
7: Leak valve, 8: Drive circuit, 9: Pulse generation circuit, 10: Vacuum gauge, 11: Control circuit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被排気室と、該被排気室を排気するターボ分子
ポンプと、該ターボ分子ポンプ内をリークするた
めのリーク弁とを備え、前記ターボ分子ポンプ内
をリーク弁でリークする際、リーク弁を間歇的に
開閉するように構成したことを特徴とするターボ
分子ポンプ用リーク弁の開閉制御装置。 It is equipped with an evacuated chamber, a turbo-molecular pump for evacuating the evacuated chamber, and a leak valve for leaking the inside of the turbo-molecular pump. 1. An opening/closing control device for a leak valve for a turbo molecular pump, characterized in that it is configured to open and close automatically.
JP18464584U 1984-12-05 1984-12-05 Expired JPH018714Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (en) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (en) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199694U true JPS6199694U (en) 1986-06-25
JPH018714Y2 JPH018714Y2 (en) 1989-03-08

Family

ID=30742130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18464584U Expired JPH018714Y2 (en) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH018714Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (en) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh Device including vacuum pump and its operating method
JP2018105300A (en) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー Vacuum pump
JP2019525071A (en) * 2016-08-15 2019-09-05 エドワーズ リミテッド Turbopump vent assembly and method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010055058A1 (en) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh A method for venting a vacuum pump and arrangement with a vacuum pump
DE102014109005A1 (en) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Method and device for flooding a vacuum chamber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (en) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh Device including vacuum pump and its operating method
JP2019525071A (en) * 2016-08-15 2019-09-05 エドワーズ リミテッド Turbopump vent assembly and method
JP2018105300A (en) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー Vacuum pump

Also Published As

Publication number Publication date
JPH018714Y2 (en) 1989-03-08

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