JPS6244065U - - Google Patents
Info
- Publication number
- JPS6244065U JPS6244065U JP13614285U JP13614285U JPS6244065U JP S6244065 U JPS6244065 U JP S6244065U JP 13614285 U JP13614285 U JP 13614285U JP 13614285 U JP13614285 U JP 13614285U JP S6244065 U JPS6244065 U JP S6244065U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- evaporation
- vacuum pump
- vacuum
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 3
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す概略構成図、
第２図は従来の装置の構成を示す図である。
１……蒸着室、２，３……開閉バルブ、４……
ロード室、５……ロード室、８，９，１０……真
空ポンプ、１３……配管、１４……開閉バルブ。
FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention;
FIG. 2 is a diagram showing the configuration of a conventional device. 1... Vapor deposition chamber, 2, 3... Open/close valve, 4...
Load chamber, 5... Load chamber, 8, 9, 10... Vacuum pump, 13... Piping, 14... Open/close valve.
Claims (1)
弁を介して連通するロード室およびアンロード室
とを有し、前記蒸着室を第１および第２の真空ポ
ンプで、前記ロード室を前記第２の真空ポンプで
、前記アンロード室を第３の真空ポンプでそれぞ
れ真空引きするようにした真空蒸着装置において
、前記蒸着室と前記アンロード室とを第３の開閉
弁を介して連通させる配管を設け、前記蒸着室の
真空引き時に前記第３の真空ポンプを協同せしめ
るようにしたことを特徴とする真空蒸着装置。 It has a vapor deposition chamber, and a load chamber and an unload chamber that communicate with the vapor deposition chamber via first and second on-off valves, and the vapor deposition chamber is connected to the load chamber by first and second vacuum pumps. In a vacuum evaporation apparatus in which a chamber is evacuated by the second vacuum pump and the unload chamber is evacuated by a third vacuum pump, the evaporation chamber and the unload chamber are connected via a third on-off valve. A vacuum evaporation apparatus, characterized in that a pipe is provided for communicating with the evaporation chamber, and the third vacuum pump cooperates with the vacuum pump when the evaporation chamber is evacuated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614285U JPS6244065U (en) | 1985-09-05 | 1985-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614285U JPS6244065U (en) | 1985-09-05 | 1985-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6244065U true JPS6244065U (en) | 1987-03-17 |
Family
ID=31038984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13614285U Pending JPS6244065U (en) | 1985-09-05 | 1985-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244065U (en) |
-
1985
- 1985-09-05 JP JP13614285U patent/JPS6244065U/ja active Pending