JPS6342156U - - Google Patents
Info
- Publication number
- JPS6342156U JPS6342156U JP13685286U JP13685286U JPS6342156U JP S6342156 U JPS6342156 U JP S6342156U JP 13685286 U JP13685286 U JP 13685286U JP 13685286 U JP13685286 U JP 13685286U JP S6342156 U JPS6342156 U JP S6342156U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust line
- exhaust
- cold trap
- main
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す排気系統図で
ある。第２図は従来例を示す排気系統図である。
第３図と第４図はそれぞれ改良された従来例を示
す排気系統図である。
１…真空チヤンバ、２…ガス導入ライン、３…
導入弁、４…排気手段、５…油拡散ポンプ、５ａ
…水冷バツフル、６…フオアバルブ、７…油回転
ポンプ、８…排気ライン、８Ａ…主排気ライン、
８Ｂ…副排気ライン、９…絞り弁兼用主弁、１０
…コールドトラツプ、１１…主弁（開閉弁）、１
２…主弁兼用絞り弁、１３…絞り弁、１４…第２
主弁（開閉弁）、１５…第２コールドトラツプ。
FIG. 1 is an exhaust system diagram showing an embodiment of the present invention. FIG. 2 is an exhaust system diagram showing a conventional example.
FIGS. 3 and 4 are exhaust system diagrams showing improved conventional examples, respectively. 1...Vacuum chamber, 2...Gas introduction line, 3...
Introduction valve, 4... Exhaust means, 5... Oil diffusion pump, 5a
…Water cooling exhaust, 6…Four valve, 7…Oil rotary pump, 8…Exhaust line, 8A…Main exhaust line,
8B... Sub-exhaust line, 9... Throttle valve/main valve, 10
...Cold trap, 11...Main valve (on-off valve), 1
2... Throttle valve that also serves as main valve, 13... Throttle valve, 14... Second
Main valve (on/off valve), 15...Second cold trap.
Claims (1)
絞り弁とコールドトラツプとを介設した排気ライ
ンを経由して排気するようにした成膜装置におい
て、前記真空チヤンバに接続される前記排気ライ
ンを主排気ラインと副排気ラインとに分岐し、前
記主排気ラインに主弁を設ける一方、前記副排気
ラインに、前記絞り弁と前記コールドトラツプと
を該コールドトラツプを上流側に配して設けたこ
とを特徴とする成膜装置の排気システム。 In a film forming apparatus in which a vacuum chamber is evacuated by an exhaust means via an exhaust line that includes at least a throttle valve and a cold trap, the exhaust line connected to the vacuum chamber is a main exhaust line. and a sub-exhaust line, and the main exhaust line is provided with a main valve, and the sub-exhaust line is provided with the throttle valve and the cold trap with the cold trap disposed on the upstream side. Exhaust system for film deposition equipment featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685286U JPS6342156U (en) | 1986-09-06 | 1986-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13685286U JPS6342156U (en) | 1986-09-06 | 1986-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342156U true JPS6342156U (en) | 1988-03-19 |
Family
ID=31040354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13685286U Pending JPS6342156U (en) | 1986-09-06 | 1986-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342156U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0551859A (en) * | 1991-08-09 | 1993-03-02 | Hisaka Works Ltd | Liquid-floe treatment apparatus for cloth of such |
| JPH0657615A (en) * | 1992-08-10 | 1994-03-01 | Ito Kogyo Kk | Cloth-widening and flow treating device for raw cloth liable to be rubbed, creased or wrinkled |
-
1986
- 1986-09-06 JP JP13685286U patent/JPS6342156U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0551859A (en) * | 1991-08-09 | 1993-03-02 | Hisaka Works Ltd | Liquid-floe treatment apparatus for cloth of such |
| JPH0657615A (en) * | 1992-08-10 | 1994-03-01 | Ito Kogyo Kk | Cloth-widening and flow treating device for raw cloth liable to be rubbed, creased or wrinkled |
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