JPH023075U - - Google Patents
Info
- Publication number
- JPH023075U JPH023075U JP7952888U JP7952888U JPH023075U JP H023075 U JPH023075 U JP H023075U JP 7952888 U JP7952888 U JP 7952888U JP 7952888 U JP7952888 U JP 7952888U JP H023075 U JPH023075 U JP H023075U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vacuum
- vacuum evacuation
- present
- evacuates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案装置を用いた成膜装置の真空排
気系統図、第２図は本考案装置の構造を模式的に
示す説明図である。
１……成膜室、２……油回転ポンプ、３……油
拡散ポンプ、４……本考案装置、５，６，７，８
……真空弁、４１……本考案装置（排気装置）の
容器、４２……大気成分と親和性の高い金属、４
３……坩堝、４４……加熱装置、４５……金属の
蒸気、４６……冷却水配管。
FIG. 1 is a vacuum exhaust system diagram of a film forming apparatus using the apparatus of the present invention, and FIG. 2 is an explanatory diagram schematically showing the structure of the apparatus of the present invention. 1... Film forming chamber, 2... Oil rotary pump, 3... Oil diffusion pump, 4... Device of the present invention, 5, 6, 7, 8
... Vacuum valve, 41 ... Container of the device of the present invention (exhaust device), 42 ... Metal with high affinity for atmospheric components, 4
3... Crucible, 44... Heating device, 45... Metal steam, 46... Cooling water piping.
Claims (1)
排気配管系に配置される坩堝と、同坩堝に入れら
れた金属を溶解する手段とを具備したことを特徴
とする真空排気装置。 1. A vacuum evacuation device that evacuates the inside of a vacuum container, the device comprising: a crucible disposed in a vacuum evacuation piping system; and means for melting metal placed in the crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7952888U JPH023075U (en) | 1988-06-17 | 1988-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7952888U JPH023075U (en) | 1988-06-17 | 1988-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023075U true JPH023075U (en) | 1990-01-10 |
Family
ID=31304402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7952888U Pending JPH023075U (en) | 1988-06-17 | 1988-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023075U (en) |
-
1988
- 1988-06-17 JP JP7952888U patent/JPH023075U/ja active Pending