JPH01122834U - - Google Patents
Info
- Publication number
- JPH01122834U JPH01122834U JP1316688U JP1316688U JPH01122834U JP H01122834 U JPH01122834 U JP H01122834U JP 1316688 U JP1316688 U JP 1316688U JP 1316688 U JP1316688 U JP 1316688U JP H01122834 U JPH01122834 U JP H01122834U
- Authority
- JP
- Japan
- Prior art keywords
- storage type
- vacuum
- chamber
- processing tank
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001172 regenerating effect Effects 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の一実施例を示す側面図、第２
図は従来の技術を示す側面図である。
１……真空処理槽、２，２ａ，２ｂ……溜込み
式真空ポンプ、３，３ａ，３ｂ……バルブ、４，
４ａ，４ｂ……再生手段。
Figure 1 is a side view showing one embodiment of the present invention;
The figure is a side view showing a conventional technique. 1... Vacuum processing tank, 2, 2a, 2b... Reservoir type vacuum pump, 3, 3a, 3b... Valve, 4,
4a, 4b... Reproduction means.
Claims (1)
台取り付け、該真空処理槽の１室が常に該溜込み
式真空ポンプで排気できるように、それぞれの該
溜込み式真空ポンプを独立して再生できる手段を
含むことを特徴とする真空装置。 A plurality of storage type vacuum pumps are installed in one chamber of the vacuum processing tank, and each storage type vacuum pump is operated independently so that one chamber of the vacuum processing tank can always be evacuated by the storage type vacuum pump. A vacuum device characterized in that it includes means capable of regenerating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316688U JPH01122834U (en) | 1988-02-02 | 1988-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316688U JPH01122834U (en) | 1988-02-02 | 1988-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122834U true JPH01122834U (en) | 1989-08-21 |
Family
ID=31223256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1316688U Pending JPH01122834U (en) | 1988-02-02 | 1988-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05269361A (en) * | 1992-03-27 | 1993-10-19 | Hitachi Ltd | Vacuum treating device |
-
1988
- 1988-02-02 JP JP1316688U patent/JPH01122834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05269361A (en) * | 1992-03-27 | 1993-10-19 | Hitachi Ltd | Vacuum treating device |