JPS5815653U - Vapor deposition equipment - Google Patents

Vapor deposition equipment

Info

Publication number
JPS5815653U
JPS5815653U JP10770181U JP10770181U JPS5815653U JP S5815653 U JPS5815653 U JP S5815653U JP 10770181 U JP10770181 U JP 10770181U JP 10770181 U JP10770181 U JP 10770181U JP S5815653 U JPS5815653 U JP S5815653U
Authority
JP
Japan
Prior art keywords
vapor deposition
vacuum container
deposition equipment
vapor
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10770181U
Other languages
Japanese (ja)
Inventor
均 中村
Original Assignee
株式会社リコー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社リコー filed Critical 株式会社リコー
Priority to JP10770181U priority Critical patent/JPS5815653U/en
Publication of JPS5815653U publication Critical patent/JPS5815653U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例を示すものである。 １・・・・・・真空容器、２・・・・・・密封容器、３
・・・・・・ヒーズヒータ、４・・・・・・蒸気排出管
、５・・・・・・被蒸着面、６、　８・・・・・・バル
ブ、７．９・・・・・田−タリーポンプ、１０・・・・
・・拡散ポンプ。The figure shows an embodiment of the present invention. 1... Vacuum container, 2... Sealed container, 3
... Heater, 4 ... Steam exhaust pipe, 5 ... Deposition surface, 6, 8 ... Valve, 7.9 ... Field -Tally pump, 10...
...Diffusion pump.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器内に蒸着材料の蒸気溜を有する密封容器を設け
、これら真空容器と密封容器の内圧の差を利用して密封
容器内の蒸気溜を真空容器内に導入し、該真空容器内の
被蒸着面に蒸着するようにしたことを特徴とする蒸着装
置。A sealed container having a vapor reservoir of the evaporation material is provided in the vacuum container, and the vapor reservoir in the sealed container is introduced into the vacuum container by utilizing the difference in internal pressure between the vacuum container and the sealed container, and the vapor deposited material in the vacuum container is introduced into the vacuum container. A vapor deposition apparatus characterized in that vapor deposition is performed on a vapor deposition surface.
JP10770181U 1981-07-22 1981-07-22 Vapor deposition equipment Pending JPS5815653U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10770181U JPS5815653U (en) 1981-07-22 1981-07-22 Vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10770181U JPS5815653U (en) 1981-07-22 1981-07-22 Vapor deposition equipment

Publications (1)

Publication Number Publication Date
JPS5815653U true JPS5815653U (en) 1983-01-31

Family

ID=29902129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10770181U Pending JPS5815653U (en) 1981-07-22 1981-07-22 Vapor deposition equipment

Country Status (1)

Country Link
JP (1) JPS5815653U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153871U (en) * 1984-03-23 1985-10-14 ダイハツデイーゼル株式会社 fuel supply device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153871U (en) * 1984-03-23 1985-10-14 ダイハツデイーゼル株式会社 fuel supply device
JPH0219580Y2 (en) * 1984-03-23 1990-05-30

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