JPS60195982U - vacuum pump equipment - Google Patents

vacuum pump equipment

Info

Publication number
JPS60195982U
JPS60195982U JP8515384U JP8515384U JPS60195982U JP S60195982 U JPS60195982 U JP S60195982U JP 8515384 U JP8515384 U JP 8515384U JP 8515384 U JP8515384 U JP 8515384U JP S60195982 U JPS60195982 U JP S60195982U
Authority
JP
Japan
Prior art keywords
vacuum pump
pump equipment
solenoid valve
vacuum
timer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8515384U
Other languages
Japanese (ja)
Other versions
JPH0343431Y2 (en
Inventor
白戸　鴻三
加藤　和紀
早坂　公朗
和保 川島
Original Assignee
株式会社エルマ、シーアール
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エルマ、シーアール filed Critical 株式会社エルマ、シーアール
Priority to JP8515384U priority Critical patent/JPS60195982U/en
Publication of JPS60195982U publication Critical patent/JPS60195982U/en
Application granted granted Critical
Publication of JPH0343431Y2 publication Critical patent/JPH0343431Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案実施の一例を示す模式図である。 図中、１は真空チャンバ、２は真空ポンプ、３はパイプ
、４は電磁弁、５はタイマである。The drawings are schematic diagrams showing an example of implementing the present invention. In the figure, 1 is a vacuum chamber, 2 is a vacuum pump, 3 is a pipe, 4 is a solenoid valve, and 5 is a timer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空チャンバと真空ポンプとを接続するパイプに電磁弁
を組込むと共に、前記電磁弁が閉じた後に所定時間真空
ポンプを動作させるタイマを備えてなる真空ポンプ装置
。A vacuum pump device comprising a solenoid valve built into a pipe connecting a vacuum chamber and a vacuum pump, and a timer for operating the vacuum pump for a predetermined period of time after the solenoid valve closes.
JP8515384U 1984-06-08 1984-06-08 vacuum pump equipment Granted JPS60195982U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8515384U JPS60195982U (en) 1984-06-08 1984-06-08 vacuum pump equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8515384U JPS60195982U (en) 1984-06-08 1984-06-08 vacuum pump equipment

Publications (2)

Publication Number Publication Date
JPS60195982U true JPS60195982U (en) 1985-12-27
JPH0343431Y2 JPH0343431Y2 (en) 1991-09-11

Family

ID=30635285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8515384U Granted JPS60195982U (en) 1984-06-08 1984-06-08 vacuum pump equipment

Country Status (1)

Country Link
JP (1) JPS60195982U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014066383A (en) * 2012-09-25 2014-04-17 Samson Co Ltd Vacuum cooling apparatus
WO2015098220A1 (en) * 2013-12-26 2015-07-02 コニカミノルタ株式会社 Inkjet printing apparatus and control method therefor
JP2017104813A (en) * 2015-12-10 2017-06-15 日立オートモティブシステムズメジャメント株式会社 Vapor recovery device
JP2019088557A (en) * 2017-11-15 2019-06-13 ニッタン株式会社 Negative-pressure and wet-type pre-action sprinkler equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014066383A (en) * 2012-09-25 2014-04-17 Samson Co Ltd Vacuum cooling apparatus
WO2015098220A1 (en) * 2013-12-26 2015-07-02 コニカミノルタ株式会社 Inkjet printing apparatus and control method therefor
JPWO2015098220A1 (en) * 2013-12-26 2017-03-23 コニカミノルタ株式会社 Ink jet recording apparatus and control method thereof
JP2017104813A (en) * 2015-12-10 2017-06-15 日立オートモティブシステムズメジャメント株式会社 Vapor recovery device
JP2019088557A (en) * 2017-11-15 2019-06-13 ニッタン株式会社 Negative-pressure and wet-type pre-action sprinkler equipment

Also Published As

Publication number Publication date
JPH0343431Y2 (en) 1991-09-11

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