JPS5834957U - Vacuum deposition equipment - Google Patents
Vacuum deposition equipmentInfo
- Publication number
- JPS5834957U JPS5834957U JP12921881U JP12921881U JPS5834957U JP S5834957 U JPS5834957 U JP S5834957U JP 12921881 U JP12921881 U JP 12921881U JP 12921881 U JP12921881 U JP 12921881U JP S5834957 U JPS5834957 U JP S5834957U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum deposition
- vacuum evaporation
- deposition equipment
- roughened
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は真空蒸着装置の一例を示す説明図である。
１・・・ベルジャ、１ａ・・・内壁面、２・・・蒸着源
、３・・・支持体、４・・・導管、５・・・バルブ、６
・・・真空ポンプ。The figure is an explanatory diagram showing an example of a vacuum evaporation apparatus. DESCRIPTION OF SYMBOLS 1... Bell jar, 1a... Inner wall surface, 2... Evaporation source, 3... Support body, 4... Conduit, 5... Valve, 6
···Vacuum pump.
Claims (1)
装置において、前記真空蒸着室の内壁面および蒸着物が
付着する可能性のある場所を所要のあらさにあらしたこ
とを特徴とする真空蒸着装置。 ２ 前記真空蒸着室の内壁面および蒸着物が付着する可
能性のある場所をサンドブラスト法によりあらしたこと
を特徴とする実用新案登録請求の範囲第１項記載の真空
蒸着装置。 ３ ベルジャの内壁面をサンドブラスト法によりあらし
たことを特徴とする実用新案登録請求の範囲第１項記載
の真空蒸着装置。[Claims for Utility Model Registration] 1. In an apparatus for depositing a deposition material onto the surface of a support in a vacuum deposition chamber, the inner wall surface of the vacuum deposition chamber and a place where a deposition material may adhere is roughened to a required roughness. A vacuum evaporation device characterized by: 2. The vacuum evaporation apparatus according to claim 1, characterized in that the inner wall surface of the vacuum evaporation chamber and the places where the deposits may adhere are roughened by sandblasting. 3. The vacuum evaporation apparatus according to claim 1, wherein the inner wall surface of the bell jar is roughened by sandblasting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12921881U JPS5834957U (en) | 1981-08-31 | 1981-08-31 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12921881U JPS5834957U (en) | 1981-08-31 | 1981-08-31 | Vacuum deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5834957U true JPS5834957U (en) | 1983-03-07 |
Family
ID=29922892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12921881U Pending JPS5834957U (en) | 1981-08-31 | 1981-08-31 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834957U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104223U (en) * | 1984-12-14 | 1986-07-02 |
-
1981
- 1981-08-31 JP JP12921881U patent/JPS5834957U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104223U (en) * | 1984-12-14 | 1986-07-02 |
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