JPS6237055U - - Google Patents
Info
- Publication number
- JPS6237055U JPS6237055U JP12900585U JP12900585U JPS6237055U JP S6237055 U JPS6237055 U JP S6237055U JP 12900585 U JP12900585 U JP 12900585U JP 12900585 U JP12900585 U JP 12900585U JP S6237055 U JPS6237055 U JP S6237055U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing apparatus
- vacuum chamber
- plasma processing
- plasma discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案のプラズマ処理装置の一実施例
を示す概略説明図、第２図は第１図のＸ―Ｘ線拡
大断面図である。
（図面の主要符号）、１：真空チヤンバ、２：
排気口、５：プラズマ発生器、７：プラズマシヤ
ワー管、９：被処理物。
FIG. 1 is a schematic explanatory diagram showing an embodiment of the plasma processing apparatus of the present invention, and FIG. 2 is an enlarged sectional view taken along the line X--X of FIG. (Main symbols in the drawing), 1: Vacuum chamber, 2:
Exhaust port, 5: plasma generator, 7: plasma shower tube, 9: object to be treated.
Claims (1)
マを照射して表面改質するためのプラズマ処理装
置において、プラズマ吐出口を放射状に設けたプ
ラズマシヤワー管を真空チヤンバ中央に配置し、
前記プラズマ吐出口に対向させて排気口を設けた
ことを特徴とするプラズマ処理装置。 In a plasma processing apparatus for irradiating a resin molded product housed in a vacuum chamber with plasma to modify its surface, a plasma shower tube with plasma discharge ports arranged radially is arranged in the center of the vacuum chamber,
A plasma processing apparatus characterized in that an exhaust port is provided opposite to the plasma discharge port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900585U JPS6237055U (en) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900585U JPS6237055U (en) | 1985-08-24 | 1985-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237055U true JPS6237055U (en) | 1987-03-05 |
Family
ID=31025190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12900585U Pending JPS6237055U (en) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237055U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016509526A (en) * | 2012-11-08 | 2016-03-31 | ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ | Tools, machine tools, machining methods |
-
1985
- 1985-08-24 JP JP12900585U patent/JPS6237055U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016509526A (en) * | 2012-11-08 | 2016-03-31 | ザウアー ウルトラソニック ゲーエムベーハーＳａｕｅｒ Ｕｌｔｒａｓｏｎｉｃ Ｇｍｂｈ | Tools, machine tools, machining methods |