JPH01165626U - - Google Patents
Info
- Publication number
- JPH01165626U JPH01165626U JP6248988U JP6248988U JPH01165626U JP H01165626 U JPH01165626 U JP H01165626U JP 6248988 U JP6248988 U JP 6248988U JP 6248988 U JP6248988 U JP 6248988U JP H01165626 U JPH01165626 U JP H01165626U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- plasma
- ashing device
- wafer
- plasma ashing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図ａ，ｂは、本考案の一実施例を示す図で
、ａは縦断面図、ｂはその平面図、第２図ａ，ｂ
は、従来のものを示す図で、ａは縦断面図、ｂは
その平面図である。
尚、図中１０はチヤンバー、１１はプラズマ室
、１２はガス導入口である。
Figures 1a and b are views showing one embodiment of the present invention, in which a is a longitudinal sectional view, b is a plan view thereof, and Figures 2a and b are
1 is a diagram showing a conventional device, in which a is a vertical sectional view and b is a plan view thereof. In the figure, 10 is a chamber, 11 is a plasma chamber, and 12 is a gas inlet.
Claims (1)
波電界を加え、プラズマを発生させてレジスト膜
を除去する枚葉式プラズマアツシング装置におい
て、 前記チヤンバーへのガス導入口をプラズマ室の
円筒部に接線方向に設けたことを特徴とする枚葉
式プラズマアツシング装置用チヤンバー。[Scope of Claim for Utility Model Registration] In a single-wafer plasma ashing device that introduces a reactive gas into a chamber and applies a high-frequency electric field to it to generate plasma and remove a resist film, a gas inlet to the chamber. A chamber for a single-wafer plasma ashing device, characterized in that a chamber is provided in a tangential direction to a cylindrical portion of a plasma chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248988U JPH01165626U (en) | 1988-05-12 | 1988-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248988U JPH01165626U (en) | 1988-05-12 | 1988-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165626U true JPH01165626U (en) | 1989-11-20 |
Family
ID=31288097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6248988U Pending JPH01165626U (en) | 1988-05-12 | 1988-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165626U (en) |
-
1988
- 1988-05-12 JP JP6248988U patent/JPH01165626U/ja active Pending