JPH0246857U - - Google Patents
Info
- Publication number
- JPH0246857U JPH0246857U JP12423888U JP12423888U JPH0246857U JP H0246857 U JPH0246857 U JP H0246857U JP 12423888 U JP12423888 U JP 12423888U JP 12423888 U JP12423888 U JP 12423888U JP H0246857 U JPH0246857 U JP H0246857U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sample
- plasma generation
- gas supply
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案装置の縦断面図、第２図は第１
図の−線による横断面図、第３図は従来装置
の縦断面図である。
１……プラズマ生成室、２……導波管、３……
試料室、４……励磁コイル、７……試料台、８，
９……ガス供給管、Ｓ……試料。
Figure 1 is a longitudinal cross-sectional view of the device of the present invention, and Figure 2 is a cross-sectional view of the device of the present invention.
A cross-sectional view taken along the line - in the figure, and FIG. 3 is a vertical cross-sectional view of the conventional device. 1... Plasma generation chamber, 2... Waveguide, 3...
Sample chamber, 4...Excitation coil, 7...Sample stand, 8,
9...Gas supply pipe, S...Sample.
Claims (1)
成室内で発生させたプラズマを用いて試料に処理
を施すプラズマ装置において、 前記プラズマ生成用の材料ガス供給管を試料の
中心線に対し対称に配置したことを特徴とするプ
ラズマ装置。[Claims for Utility Model Registration] In a plasma device that processes a sample using plasma generated in a plasma generation chamber by electron cyclotron resonance excitation, the material gas supply pipe for plasma generation is arranged symmetrically with respect to the center line of the sample. A plasma device characterized in that it is arranged in a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423888U JPH0246857U (en) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12423888U JPH0246857U (en) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246857U true JPH0246857U (en) | 1990-03-30 |
Family
ID=31373797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12423888U Pending JPH0246857U (en) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246857U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (en) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | Sewing machine needle clamps |
-
1988
- 1988-09-22 JP JP12423888U patent/JPH0246857U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0585380U (en) * | 1992-04-20 | 1993-11-19 | 株式会社鈴木製作所 | Sewing machine needle clamps |