JPS6365943U - - Google Patents
Info
- Publication number
- JPS6365943U JPS6365943U JP16000386U JP16000386U JPS6365943U JP S6365943 U JPS6365943 U JP S6365943U JP 16000386 U JP16000386 U JP 16000386U JP 16000386 U JP16000386 U JP 16000386U JP S6365943 U JPS6365943 U JP S6365943U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- gas supply
- filter
- gas
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
第１図は本考案に係るイオン源用ガス供給装置
を示す簡略構成図、第２図はフイルタの断面図、
第３図は従来のイオン源用ガス供給装置の簡略構
成図である。
１０……ガスボンベ、２０……ガス供給管、３
０……イオン源、４０……フイルタ。
Fig. 1 is a simplified configuration diagram showing a gas supply device for an ion source according to the present invention, Fig. 2 is a sectional view of a filter,
FIG. 3 is a simplified configuration diagram of a conventional gas supply device for an ion source. 10...Gas cylinder, 20...Gas supply pipe, 3
0...Ion source, 40...Filter.
Claims (1)
水素分離膜を有するフイルタを設けたことを特徴
とするイオン源用ガス供給装置。 In the gas supply pipe that supplies hydrogen gas to the ion source,
A gas supply device for an ion source, characterized in that it is provided with a filter having a hydrogen separation membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16000386U JPS6365943U (en) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16000386U JPS6365943U (en) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365943U true JPS6365943U (en) | 1988-04-30 |
Family
ID=31084964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16000386U Pending JPS6365943U (en) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365943U (en) |
-
1986
- 1986-10-17 JP JP16000386U patent/JPS6365943U/ja active Pending