JPS63149941U - - Google Patents
Info
- Publication number
- JPS63149941U JPS63149941U JP4328187U JP4328187U JPS63149941U JP S63149941 U JPS63149941 U JP S63149941U JP 4328187 U JP4328187 U JP 4328187U JP 4328187 U JP4328187 U JP 4328187U JP S63149941 U JPS63149941 U JP S63149941U
- Authority
- JP
- Japan
- Prior art keywords
- grounded electrode
- utility
- model registration
- electrode
- rotating cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
- 239000000178 monomer Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatment Of Fiber Materials (AREA)
Description
第１図及び第２図は、本考案の連続式プラズマ
処理装置の一例を示す。
１は真空容器、２はガス吹出し孔を有する接地
側電極、３は円筒型非接地電極、４は処理物の出
入口、５はガイドローラー、６は真空ポンプに通
じる排気孔、７はガス導入孔、８は円筒型非接地
電極の絶縁固定具、９は高周波の導入部であり、
１０と１１は冷却或いは温調媒体の導入・流出孔
、１２は高周波電源、１３はモノマー或いはガス
吹出し孔である。１４は処理物、１５は自由回転
する円筒、１６はローラー、１７は非接地電極内
部、１８は非接地電極表面を示す。
1 and 2 show an example of a continuous plasma processing apparatus according to the present invention. 1 is a vacuum container, 2 is a grounded electrode with a gas blowing hole, 3 is a cylindrical non-grounded electrode, 4 is an inlet/outlet for the processed material, 5 is a guide roller, 6 is an exhaust hole leading to a vacuum pump, and 7 is a gas introduction hole , 8 is an insulating fixture for a cylindrical non-grounded electrode, 9 is a high frequency introduction part,
Reference numerals 10 and 11 are inlet and outlet holes for a cooling or temperature regulating medium, 12 is a high frequency power source, and 13 is a monomer or gas blowing hole. 14 is the object to be treated, 15 is a freely rotating cylinder, 16 is a roller, 17 is the inside of the non-grounded electrode, and 18 is the surface of the non-grounded electrode.
Claims (1)
に配設された複数のローラーと、該ローラーに外
接しかつそれによつて自由回転する円筒と、該自
由回転する円筒をおおう部分円筒型接地電極と、
処理物を前記自由回転する円筒の外側に接触させ
て走行せしめるための手段とを真空容器中に有す
るプラズマ処理装置。 (2) 接地電極にガス或いはモノマーガス吹き出
し孔を有する実用新案登録請求の範囲第１項記載
の装置。[Claims for Utility Model Registration] (1) A cylindrical non-grounded electrode, a plurality of rollers disposed outside the non-grounded electrode, a cylinder circumscribing the rollers and rotating freely thereby, and the free a partially cylindrical ground electrode that covers the rotating cylinder;
A plasma processing apparatus comprising, in a vacuum container, a means for moving a processing object in contact with the outside of the freely rotating cylinder. (2) The device according to claim 1 of the utility model registration claim, which has a gas or monomer gas blowing hole in the ground electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4328187U JPS63149941U (en) | 1987-03-23 | 1987-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4328187U JPS63149941U (en) | 1987-03-23 | 1987-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149941U true JPS63149941U (en) | 1988-10-03 |
Family
ID=30859990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4328187U Pending JPS63149941U (en) | 1987-03-23 | 1987-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149941U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002337210A (en) * | 2001-05-21 | 2002-11-27 | Okura Ind Co Ltd | Inner surface-treated plastic tube manufacturing apparatus and method for manufacturing inner surface- treated plastic tube using the same |
-
1987
- 1987-03-23 JP JP4328187U patent/JPS63149941U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002337210A (en) * | 2001-05-21 | 2002-11-27 | Okura Ind Co Ltd | Inner surface-treated plastic tube manufacturing apparatus and method for manufacturing inner surface- treated plastic tube using the same |
| JP4570277B2 (en) * | 2001-05-21 | 2010-10-27 | 大倉工業株式会社 | Inner surface treatment plastic tube manufacturing apparatus, and inner surface treatment plastic tube manufacturing method using the apparatus |
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