JPS63140040U - - Google Patents
Info
- Publication number
- JPS63140040U JPS63140040U JP3344287U JP3344287U JPS63140040U JP S63140040 U JPS63140040 U JP S63140040U JP 3344287 U JP3344287 U JP 3344287U JP 3344287 U JP3344287 U JP 3344287U JP S63140040 U JPS63140040 U JP S63140040U
- Authority
- JP
- Japan
- Prior art keywords
- grounded electrode
- rollers
- attached
- utility
- grounded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004744 fabric Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 239000004745 nonwoven fabric Substances 0.000 claims 1
- -1 sheet Substances 0.000 claims 1
- 239000000178 monomer Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
第１図、第２図及び第３図は電極廻りの詳細図
、第３図及び第４図は本考案の全体図の具体例を
示す。
第１図、第２図及び第４図において、１は非接
地電極で、２は接地電極、３，４，５は自由回転
ローラー、６，７は、ローラー４，５を非接地電
極に着脱させる機構、１４は被処理物、１５はガ
ス或いはモノマーガス等の吹き出し孔、１６は非
接地電極の冷却や温度調節用の媒体の流路である
。
第３図及び第５図において８は被処理装置本体
で、ここでは箱型真空容器の例を示す。９はガス
或いはモノマーガスの導入孔、１０は真空ポンプ
につづく排気孔、１１は低周波或いは高周波電源
からのケーブル、１２と１３は被処理物の送り出
し或いは巻取りローラーを示す。
FIGS. 1, 2, and 3 are detailed views around the electrodes, and FIGS. 3 and 4 are specific examples of the overall view of the present invention. In Figures 1, 2, and 4, 1 is a non-grounded electrode, 2 is a grounded electrode, 3, 4, and 5 are freely rotating rollers, and 6 and 7 are rollers 4 and 5 that can be attached to and removed from the non-grounded electrode. 14 is a workpiece, 15 is a blowout hole for gas or monomer gas, and 16 is a flow path for a medium for cooling the non-grounded electrode and adjusting the temperature. In FIGS. 3 and 5, reference numeral 8 denotes the main body of the processing apparatus, and here an example of a box-shaped vacuum container is shown. Reference numeral 9 indicates an inlet for gas or monomer gas, 10 indicates an exhaust port connected to a vacuum pump, 11 indicates a cable from a low frequency or high frequency power source, and 12 and 13 indicate rollers for sending out or winding up the material to be processed.
補正 昭６２．６．１７
図面の簡単な説明を次のように補正する。
明細書第１１頁１１行に記載の「第３図」を「
第４図」と訂正する。
明細書第１１頁１２行に記載の「第４図」を「
第５図」と訂正する。Amendment June 17, 1982 The brief description of the drawing is amended as follows. "Figure 3" described on page 11, line 11 of the specification is replaced with "
Figure 4” is corrected. "Figure 4" described on page 11, line 12 of the specification is replaced with "
Figure 5” is corrected.
Claims (1)
電極に被処理物１４を密着せしめるための手段３
、及び前記非接地電極と対になつた接地電極２と
を真空容器８中に有するプラズマ処理装置。 (2) 被処理物が布、フイルム、シート、膜、不
織布である実用新案登録請求の範囲第１項記載の
装置。 (3) 非接地電極及び接地電極が平板電極である
実用新案登録請求の範囲第１項記載の装置。 (4) 手段３が少なくとも３個のローラーで構成
される実用新案登録請求の範囲第１項記載の装置
。 (5) ローラーの少なくとも１個は非接地電極の
先端に付いた固定ローラーであり、他の少なくと
も２個は根本についた非接地電極に圧着・脱着可
能なローラーである実用新案登録請求の範囲第４
項記載の装置。[Claims for Utility Model Registration] (1) Temperature-adjustable non-grounded electrode 1 and means 3 for bringing the object to be processed 14 into close contact with the non-grounded electrode
, and a grounded electrode 2 paired with the non-grounded electrode in a vacuum vessel 8. (2) The apparatus according to claim 1, wherein the object to be treated is cloth, film, sheet, membrane, or nonwoven fabric. (3) The device according to claim 1, wherein the non-grounded electrode and the grounded electrode are flat plate electrodes. (4) The device according to claim 1, wherein the means 3 comprises at least three rollers. (5) At least one of the rollers is a fixed roller attached to the tip of the non-grounded electrode, and at least two other rollers are rollers that can be attached to and detached from the non-grounded electrode attached to the base of the utility model. 4
Apparatus described in section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3344287U JPS63140040U (en) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3344287U JPS63140040U (en) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140040U true JPS63140040U (en) | 1988-09-14 |
Family
ID=30841058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3344287U Pending JPS63140040U (en) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140040U (en) |
-
1987
- 1987-03-06 JP JP3344287U patent/JPS63140040U/ja active Pending
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