JPH0479419U - - Google Patents
Info
- Publication number
- JPH0479419U JPH0479419U JP12129890U JP12129890U JPH0479419U JP H0479419 U JPH0479419 U JP H0479419U JP 12129890 U JP12129890 U JP 12129890U JP 12129890 U JP12129890 U JP 12129890U JP H0479419 U JPH0479419 U JP H0479419U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- leak
- gas
- chamber
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は考案実施例の試料回収室周辺の正面図
である。
１……試料室、２……試料交換室、３……エア
ロツクバルブ、４……試料回収室、５……カセツ
ト、６……試料（待機中含む）、７……リークバ
ルブ、８……フイルタ、９……減圧弁、１０……
高圧ガス源、１１……自動連続試料交換装置。
FIG. 1 is a front view of the vicinity of the sample collection chamber of the invented embodiment. 1... Sample chamber, 2... Sample exchange room, 3... Air valve, 4... Sample collection chamber, 5... Cassette, 6... Sample (including during standby), 7... Leak valve, 8... ...Filter, 9...Reducing valve, 10...
High pressure gas source, 11...Automatic continuous sample exchange device.
Claims (1)
自動連続試料交換機能を有する試料回収室に於い
て、リーク装置のガスリーク口を試料回収室の試
料上部に設け、リークガスを試料表面に吹き付け
ることを特徴とする試料回収室。 ２ 請求項第１項に於いて、試料が試料装着カセ
ツトにセツトされた後ガスがリークされ、試料が
試料交換室へ移送される前にガスリークが停止す
ることを特徴とする試料回収室。 ３ 請求項第２項に於いて、リーク装置が高圧ガ
ス源と減圧弁とフイルタとリークバルブとからな
ることを特徴とする試料回収室。[Scope of Claim for Utility Model Registration] 1. In a sample collection chamber with an automatic continuous sample exchange function that is separated from the sample exchange chamber by a gate valve, a gas leak port of a leak device is provided above the sample in the sample collection chamber to prevent leakage gas. A sample recovery chamber characterized by spraying the liquid onto the sample surface. 2. The sample recovery chamber according to claim 1, wherein gas is leaked after the sample is set in the sample mounting cassette, and the gas leak is stopped before the sample is transferred to the sample exchange chamber. 3. The sample recovery chamber according to claim 2, wherein the leak device comprises a high pressure gas source, a pressure reducing valve, a filter, and a leak valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12129890U JPH0479419U (en) | 1990-11-21 | 1990-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12129890U JPH0479419U (en) | 1990-11-21 | 1990-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479419U true JPH0479419U (en) | 1992-07-10 |
Family
ID=31869158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12129890U Pending JPH0479419U (en) | 1990-11-21 | 1990-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479419U (en) |
-
1990
- 1990-11-21 JP JP12129890U patent/JPH0479419U/ja active Pending
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