JPH02131341U - - Google Patents
Info
- Publication number
- JPH02131341U JPH02131341U JP3990689U JP3990689U JPH02131341U JP H02131341 U JPH02131341 U JP H02131341U JP 3990689 U JP3990689 U JP 3990689U JP 3990689 U JP3990689 U JP 3990689U JP H02131341 U JPH02131341 U JP H02131341U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cavity
- holding
- gas
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案に係るウエハ保持装置の模式的
縦断面図、第２図は第１図の−線による横断
面図、第３図は従来のウエハ保持装置の縦断面図
である。
１……保持板、１０……囲繞部、１１……ガス
導入口、１２……ガス導出口、１３……給気管、
１４……排気管。
FIG. 1 is a schematic vertical cross-sectional view of a wafer holding device according to the present invention, FIG. 2 is a cross-sectional view taken along the - line in FIG. 1, and FIG. 3 is a vertical cross-sectional view of a conventional wafer holding device. DESCRIPTION OF SYMBOLS 1... Holding plate, 10... Surrounding part, 11... Gas inlet, 12... Gas outlet, 13... Air supply pipe,
14...Exhaust pipe.
Claims (1)
持板との間にガスを通流させ、前記ウエハの表裏
面間に生じる圧力差により該ウエハを保持する装
置において、 前記保持板の前記ウエハとの対向面側に周設さ
れ、前記近接対向時にウエハの周縁に当接して両
者間に空洞を形成する囲繞部と、 該囲繞部に共に形成され、前記保持板の中央に
向けて前記空洞内に開口するガス導入口と、 該ガス導入口と略対向して前記空洞内に開口す
るガス導出口と を具備することを特徴とするウエハ保持装置。[Claims for Utility Model Registration] In an apparatus for holding a wafer by causing gas to flow between a wafer to be held and a holding plate closely opposing the wafer, and using a pressure difference generated between the front and back surfaces of the wafer, an enclosing portion provided around the side of the holding plate facing the wafer and abutting against the periphery of the wafer to form a cavity between the two when the wafer is closely opposed; A wafer holding device comprising: a gas inlet opening into the cavity toward the center; and a gas outlet opening into the cavity substantially opposite the gas inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3990689U JPH02131341U (en) | 1989-04-03 | 1989-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3990689U JPH02131341U (en) | 1989-04-03 | 1989-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131341U true JPH02131341U (en) | 1990-10-31 |
Family
ID=31549225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3990689U Pending JPH02131341U (en) | 1989-04-03 | 1989-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131341U (en) |
-
1989
- 1989-04-03 JP JP3990689U patent/JPH02131341U/ja active Pending