JPH0292179U - - Google Patents
Info
- Publication number
- JPH0292179U JPH0292179U JP68189U JP68189U JPH0292179U JP H0292179 U JPH0292179 U JP H0292179U JP 68189 U JP68189 U JP 68189U JP 68189 U JP68189 U JP 68189U JP H0292179 U JPH0292179 U JP H0292179U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- opening
- vacuum
- valve body
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Description
図面は本考案の実施例を示すもので、第1図は
真空装置用バルブの中央縦断面図、第2図は第1
図の―線で切断した平面図であり、第3図は
真空装置の従来例を説明する概要図である。
1…真空装置用バルブ、2…吸引管路、3…弁
箱、4…弁座、5…弁体、6…平行リンク機構、
10…開閉手段。
The drawings show an embodiment of the present invention, and FIG. 1 is a central vertical sectional view of a valve for a vacuum device, and FIG.
3 is a plan view taken along the line ``--'' in the figure, and FIG. 3 is a schematic diagram illustrating a conventional example of a vacuum device. DESCRIPTION OF SYMBOLS 1... Valve for vacuum equipment, 2... Suction pipe line, 3... Valve box, 4... Valve seat, 5... Valve body, 6... Parallel link mechanism,
10...Opening/closing means.
Claims (1)
を負圧に保つための真空ポンプとを接続する吸引
管路に設けられたもので、弁体が弁座に対し水平
を保つて上下移動可能に設けられるとともに、こ
の弁体を開閉するための開閉手段が、弁箱に沿つ
て設けられたことを特徴とする真空装置用バルブ
。 This is installed in the suction line that connects the vacuum chamber that houses the workpiece and the vacuum pump that maintains negative pressure inside the vacuum chamber, and allows the valve body to move up and down while keeping it horizontal to the valve seat. 1. A valve for a vacuum device, characterized in that an opening/closing means for opening and closing the valve body is provided along a valve box.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989000681U JPH0540384Y2 (en) | 1989-01-07 | 1989-01-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989000681U JPH0540384Y2 (en) | 1989-01-07 | 1989-01-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0292179U true JPH0292179U (en) | 1990-07-23 |
JPH0540384Y2 JPH0540384Y2 (en) | 1993-10-13 |
Family
ID=31199927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989000681U Expired - Lifetime JPH0540384Y2 (en) | 1989-01-07 | 1989-01-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0540384Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0439480A (en) * | 1990-05-31 | 1992-02-10 | Kokusai Electric Co Ltd | Double pressure-corresponding type load lock valve for vacuum device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676777U (en) * | 1979-11-16 | 1981-06-23 | ||
JPS6058981U (en) * | 1983-09-28 | 1985-04-24 | 株式会社 徳田製作所 | vacuum valve device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1109078A (en) * | 1975-11-05 | 1981-09-15 | Alfred A. Schleppnik | Malodor counteractants |
-
1989
- 1989-01-07 JP JP1989000681U patent/JPH0540384Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5676777U (en) * | 1979-11-16 | 1981-06-23 | ||
JPS6058981U (en) * | 1983-09-28 | 1985-04-24 | 株式会社 徳田製作所 | vacuum valve device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0439480A (en) * | 1990-05-31 | 1992-02-10 | Kokusai Electric Co Ltd | Double pressure-corresponding type load lock valve for vacuum device |
Also Published As
Publication number | Publication date |
---|---|
JPH0540384Y2 (en) | 1993-10-13 |