JPS63140039U - - Google Patents
Info
- Publication number
- JPS63140039U JPS63140039U JP3229487U JP3229487U JPS63140039U JP S63140039 U JPS63140039 U JP S63140039U JP 3229487 U JP3229487 U JP 3229487U JP 3229487 U JP3229487 U JP 3229487U JP S63140039 U JPS63140039 U JP S63140039U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- grounded
- gas
- grounded electrode
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000000178 monomer Substances 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
第１図及び第２図はバツチ式の本考案装置の一
例を示す。
１……プラズマ処理装置真空容器、２……接地
電極、３……回転円筒型非接地電極、４……処理
物の送り出し／巻き取りローラー、５……ガイド
ローラー、６……ガス、モノマーガス導入孔、７
……排気孔、８……送り出し／巻き取りローラー
駆動系、９……通常の軸受け、１０，１２……絶
縁性の軸受け、１１……高周波導入治具、１３…
…高周波電源、１４……処理物。
また第３図、第４図には連続式の本考案装置の
一例を示す。
１……プラズマ処理装置真空容器、２……接地
電極、３……回転円筒型非接地電極、４……シー
ルローラー部及び処理物の送り出し／引き出しロ
ーラー、５……ガイドローラー、６……排気孔、
７……ガス、モノマーガス導入孔、８……絶縁性
の軸受け、９……高周波導入治具、１０……冷却
水入り口、１１……冷却水出口、１２……高周波
電源、１３……ガス、モノマーガス吹き出し孔、
１４……処理物。
FIGS. 1 and 2 show an example of the batch-type apparatus of the present invention. DESCRIPTION OF SYMBOLS 1...Plasma processing apparatus vacuum vessel, 2...Grounded electrode, 3...Rotating cylindrical non-grounded electrode, 4...Processing material delivery/winding roller, 5...Guide roller, 6...Gas, monomer gas Introduction hole, 7
... Exhaust hole, 8 ... Delivery/take-up roller drive system, 9 ... Ordinary bearing, 10, 12 ... Insulating bearing, 11 ... High frequency introduction jig, 13 ...
...High frequency power supply, 14...Processing material. Further, FIGS. 3 and 4 show an example of a continuous type apparatus of the present invention. DESCRIPTION OF SYMBOLS 1...Plasma processing apparatus vacuum container, 2...Grounded electrode, 3...Rotating cylindrical non-grounded electrode, 4...Seal roller section and processing material delivery/extraction roller, 5...Guide roller, 6...Exhaust hole,
7... Gas, monomer gas introduction hole, 8... Insulating bearing, 9... High frequency introduction jig, 10... Cooling water inlet, 11... Cooling water outlet, 12... High frequency power supply, 13... Gas , monomer gas outlet,
14...Processed material.
Claims (1)
非接地電極３と、該電極をおおう部分円筒型接地
電極２と、処理物１４を前記非接地電極の外側に
接触させて走行せしめる為の手段（４及び５）と
を有するプラズマ処理装置。 (2) 接地電極２にガス或いは、モノマーガス吹
き出し孔１３を有する実用新案登録請求の範囲第
１項記載の装置。[Claims for Utility Model Registration] (1) A rotary cylindrical non-grounded electrode 3 whose temperature can be adjusted in a vacuum container 1, a partially cylindrical grounded electrode 2 covering the electrode, and a material to be processed 14 placed between the non-grounded electrodes. A plasma processing apparatus having means (4 and 5) for causing the device to travel in contact with the outside. (2) The device according to claim 1, which has a gas or monomer gas blowing hole 13 in the ground electrode 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3229487U JPS63140039U (en) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3229487U JPS63140039U (en) | 1987-03-05 | 1987-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140039U true JPS63140039U (en) | 1988-09-14 |
Family
ID=30838838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3229487U Pending JPS63140039U (en) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140039U (en) |
-
1987
- 1987-03-05 JP JP3229487U patent/JPS63140039U/ja active Pending
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