JPS58152026A - Treating apparatus for plastic film - Google Patents

Abstract

PURPOSE:The titled treating apparatus, having a DC power source for applying a DC voltage to a plastic film to be treated in treating the plastic film with a plasma by the electric discharge, and capable of treating a wide area without deteriorating the electrical characteristics, strength and chemical resistance. CONSTITUTION:In a plasmatic treating apparatus for treating a plastic film having a plasma generating system 1 having a microwave generator tube 9, a waveguide 10 for transmitting the microwaves connected to the microwave generator tube 9 and an electric discharge tube 11 for generating a plasma passed through the waveguide 10 and a film treating system 2 having a treating vessel 20 constituting a treating chamber 19 through a water cooling apparatus 16 placed therebetween, a film to be treated is treated with active species in the plasma between a delivery rotating mechanism 25 and a winding rotating mechanism 26 while applied with a DC voltage from a DC power source 70 through supply electric wires 71, supply terminal 69 and plate electrodes 68 to give the aimed treated film.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a plasma processing apparatus for processing plastic films, and particularly for uniformly processing a large area.
The present invention relates to a plastic film processing apparatus that processes plastic film while applying flow soldering pressure.

Technical Background of the Invention and Problems There are two types of apparatuses for treating plastic films with plasma: those that process in plasma, and those that are separated from the plasma and process downstream.

These two methods each have the following characteristics. The book on the method of processing in plasma is Spread of Plasma! 7
Although a wide area can be uniformly treated depending on the conditions, the film to be treated deteriorates due to bombardment of electrons and ions in the plasma or ultraviolet irradiation.

In particular, ultraviolet rays include the short wavelength region of the vacuum ultraviolet region, which may cause yellowing of transparent plastic films. Modification caused by these treatments not only deteriorates electrical properties such as withstand voltage, physical properties such as bending and tensile properties, and chemical properties such as chemical resistance, but also reduces commercial value. In addition, the temperature in the plasma is 300 to 700℃.
There is also the problem that only materials that do not undergo thermal deformation even at a certain high temperature can be processed.

On the other hand, in the case of processing in the downstream separated from the plasma, there is no interruption when processing in the plasma as shown in the button above, but in order to flow out the active species at a concentration above a certain level, the plasma is heated to a high density eK. Therefore, plasma cannot be generated over a wide area, and a wide area of the plastic film cannot be uniformly treated.

Therefore, there is a need for an apparatus that can uniformly process a wide area without changing the properties of the plastic film due to the processing button.

OBJECTS OF THE INVENTION An object of the present invention is to provide a plasma processing apparatus for processing plastic films, which uniformly processes a wide area by applying a DC voltage to the plastic film to be processed.

Summary of the Invention The plastic film processing apparatus of the present invention generates plasma by electric discharge, and when processing the plastic film with active species in the plasma, uniformly processes a wide area by applying a direct current voltage to each film to be processed. It is characterized by:

Embodiments of the Invention The processing arrangement of the present invention will be explained in detail with reference to FIG. 1 (longitudinal sectional view). Note that FIG. 2 is a sectional view taken along line 1-i' in FIG.

This apparatus includes a plasma generation system 1, a treatment system 2 for treating a glass film with active species generated in the plasma generation system 1, a means 3 for supplying discharge gas (processing gas) to the plasma generation system, and a The discharge gas supply means is connected to the on-off valve 58 of the gas pump 5 and the nuclear cylinder 5, and is connected to nine pipes 6.
, a gas flow meter 7 and a needle valve 8 provided on the pipe 6. As the discharge gas, oxygen,
Noble gases, nitrogen, carbon dioxide, sulfur dioxide, halogenated methane, etc. are suitable. The flow rate of the processing gas is adjusted by a flow needle 7 and a needle valve 8.

The plasma generation system is connected to a microwave oscillation a9 such as a magnetron and a nuclear microwave oscillation aK, a waveguide 1o for transmitting the micro technique, and an internal button placed through the nuclear waveguide. Discharge tube 11 for generating plasma
It is composed of.

The discharge tube 11 is usually made of quartz and has seven flange parts 11.
At a, the water cooling device 1 is closed by a sealing member 12 such as an O-ring.
5 and is airtightly connected. The waveguide 10 is equipped with a three-stub tuner 1-3 and a plunger 14 for impedance matching. A water cooling device 15,16 for cooling the discharge tube 11 is also provided. A pipe 6 from a gas supply means for electric discharge is connected to one end of the discharge tube 11 . 17, 7 lunges covering the discharge tube 11; 18;
is a nine O-ring inserted between the flange 17 and the water cooling device 16. 2 film processing systems, the discharge tube 11
A processing container 20 constituting a processing chamber 19 is provided on the other end side, which is airtightly connected via a water cooling device 16 . The processing container 20 is provided with a lid 22 having an exhaust port 21 connected to the exhaust means 4 on the side opposite to the side connected to the discharge tube 11 . 23 is a capacitance manometer. The inner wall 24 of the processing container is coated with a material that is stable against active species, such as fluororesin or enamel. The processing chamber 19 is an area that accommodates the film to be processed, and is an area where the film is processed by active species in the plasma generated in the discharge tube 11. In order to process the film continuously, a % unwinding rotation mechanism 25 and a winding rotation mechanism 26 are provided.
is provided.

For a second, the film is processed while running between the unwinding rotation mechanism 25 and the winding paper rotation mechanism 26. Reference numeral 68 denotes a plate-shaped electrode for applying a DC voltage, and is set in close contact with the surface of the film opposite to the surface to be processed, with a predetermined gap therebetween. 69 is a supply terminal for introducing voltage into the processing chamber, and 70 is a DC power source 71 which is a supply wire.

Next, the film winding and unwinding mechanism is shown in Figure 2 (1-1).
”) will be explained based on the cross section.

27 and 28 are an unwinding rotary tube and a winding rotary tube, respectively. The unwinding rotary tube 27 is loaded with a rolled film to be processed, and the film is processed and wound up into the winding tube 28. . These rotary cylinders are connected to rotary drive shafts 29 and 30, respectively.

The rotational drive shafts 29 and 30 are housed at the other ends in four parts (drive shaft storage housings) 33 and 34 provided at the center fIAK of the disc-shaped lids 31 and 32. A cool member 3 such as an O-ring is installed between the processing container 20 and the algae bodies 31 and 32.
5.36, hermetically sealed. This airtightness is naturally achieved during the rounding operation in which a suction force is applied to the corpses 31 and 32 when the exhaust means 4 is operated to reduce the pressure in the processing chamber 19, but it may also be tightened with bolts, nuts, etc.

The concave portion (drive shaft storage housing 33, 34) of the lid body has a cylindrical shape with a rainbow-colored end sealed, and the rotary drive shaft 2 is housed inside.
One end of the 9°30 is inserted. The rotary drive shaft is rotatably supported by bearings 37 and 38 provided on the lid, and is not in any contact with the lid and the drive shaft housing housing 41. Rotary drive shaft end 29a, 3
0a is made of ferromagnetic material such as steel.

As described below, it rotates using magnetic force. A plurality of magnets 39, 40 . In this embodiment, rotating bodies 41 and 42 each having four magnets arranged at equal intervals are arranged with a gap of 43.44. The rotating bodies 41 and 42 are rotatably supported (supporting means, not shown) around the drive shaft storage housing 33, 34 at one distance apart. Winding rotation mechanism 2
6 is connected to a drive motor 45. The power of this motor is transmitted to the rotating body 42 by a belt 46, and a button is provided so that the rotating body 42 can be rotated around the drive shaft storage housing 34. When the rotary body 34 rotates, the magnetic field formed by the four magnets of the rotary body also rotates, so that the rotary drive shaft 30Th and the rotary tube 28 connected to the rotary drive shaft also rotate, and the film is rotated. 6 48 and 49 are a holding plate and a lock nut, respectively, which hold down the film as it travels through the processing area and is wound up while being processed. 350-a
is a screw that connects the rotation drive shaft and the rotation cylinder. Unwinding rotation 8! A brake 48 is connected to the mechanism 25. This brake is transmitted to the rotating body 4 by a belt 51.
Brake 10 revolutions. As a result of this, the rotary cylinder 47 is also braked, and the degree of tension during film travel and winding tightness during winding is adjusted.

52 is system@? This is a controller that controls the braking force of the lIl and the rotation speed of the motor. 53 is a holding plate, 54 is a lock nut, and 55 is an intermediate support rod for the film.

Also, 56, 57, 58, and 59 are cool members such as O-rings, 60, 61, 62, and 63 are lid bodies, and 50-b is a screw.

The exhaust port 21 is provided on the opposite side of the processing chamber from the discharge tube side. This is because the active species present in the plasma generated in the discharge tube must flow so as to fully contact the film disposed in the processing chamber.

The exhaust means 4 connected to the exhaust port 21 includes a pipe 64, a valve 65, a trap 66, and an oil rotary pump 67.

Next, a procedure for processing a film using the apparatus of the above embodiment will be explained. First, the oil rotary pump 67 is operated to exhaust the inside of the processing container 20 to a pressure of 10-3 TOrr or less. Next, discharge gas is supplied from the gas cylinder 5 to the discharge tube 11 via the flow meter 7 and the needle valve 8. At this time, the oil rotary pump 67 continues evacuation, and the pressure inside the normal processing chamber 19 is adjusted to about 10 to several Torr. The pressure and gas flow rate are adjusted using the needle valve 8 while observing the capacitance manometer 23 and flow meter 7.

Next, the microwave oscillator 9 is operated, for example, the frequency IJj
! 12450 2. A microwave of power ~IKW is oscillated, impedance matching is performed by the three-stub chainer 13 and plunger 14 of the waveguide 10, and the microwave is transmitted into the discharge tube 11. Then, the discharge gas flowing in the discharge tube 11 is discharged, and plasma is generated. The activated species in the plasma are carried from the discharge tube 11 to the processing chamber 19 by the gas flow, and come into contact with the film that has been passed through the processing chamber K1.

A DC voltage is applied to an electrode 68 placed on the back side of the surface of the film to be processed. 'The voltage is usually several hundred volts, but it is possible to apply a voltage that does not cause dielectric breakdown of the film.

After completing the operations for processing the film as described above, the motor 45, brake 48, and controller 52 are operated, and the film runs at a predetermined speed and is wound with appropriate winding tightness while being processed. taken.

Examples of the present invention will be given below and explained in more detail.

Concrete Example @ Regarding the apparatus shown in Fig. 1, an example of processing a polyethylene terephthalate film when DC voltage is applied and when it is not applied is shown in Fig. 3.

The plasma conditions are oxygen gas 1. QTorr, discharge power 5oovv, processing power 26cW from the plasma center
The distance was L, and the film running speed was 1 m/min.

In Figure 3, (a) is an untreated film, (b) is a film treated with plasma under the above conditions, and (C) is a film treated under the above conditions with a DC voltage of 120 V applied. . The treatment effect is expressed as the contact angle with respect to pure water, which is plotted on the vertical axis, and the length in the width direction of the film is plotted on the horizontal axis. As you can see from this figure, when no DC voltage is applied, the effect decreases as the distance from the center of the film increases in the width direction, but when DC voltage is applied, the effect decreases as it moves away from the center in the width direction. It can be seen that similar effects are obtained.

Effect of the invention ■A wide area can be treated uniformly.

■Predetermined effects can be obtained in a short processing time.

■Even if the discharge force is reduced, the desired effect can be obtained, resulting in power savings.

■Processing can be performed even if the processing position is far away from the plasma, improving work efficiency.

■By changing the shape of the electrode to which the DC voltage is applied, the processing area in the width direction can be selected.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing one embodiment of the processing apparatus of the present invention, FIG. 2 is a sectional view taken along line 1-1' in FIG.
The figure is a characteristic diagram comparing processing examples when a KW voltage is not applied as in a conventional device and when a DC voltage is applied according to the present invention. 1... Plasma generation system, 2... Film processing system, 3
...discharge gas supply system, 4...exhaust means, 25...
-Film unwinding mechanism, 26...Film winding mechanism, 42.43...Rotating body, 45...Motor, 4B...Brake, 52...
Controller, 68... Electrode, 70... DC power supply. Agent: Patent attorney Kensuke Chika (#'! or 1 person)

Claims (2)

[Claims] (1) A plastic film processing apparatus for processing plastic film, characterized in that the plasma processing apparatus is equipped with a DC power supply that is applied to the film to be processed during processing. (2) The plastic film processing apparatus according to claim 1, wherein the DC power is applied to a side of the film to be processed opposite to the side to be processed.