JPS61115129U - - Google Patents

Info

Publication number
JPS61115129U
JPS61115129U JP20128284U JP20128284U JPS61115129U JP S61115129 U JPS61115129 U JP S61115129U JP 20128284 U JP20128284 U JP 20128284U JP 20128284 U JP20128284 U JP 20128284U JP S61115129 U JPS61115129 U JP S61115129U
Authority
JP
Japan
Prior art keywords
waste gas
treatment means
gas treatment
diluted
discharged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20128284U
Other languages
Japanese (ja)
Other versions
JPH0344252Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984201282U priority Critical patent/JPH0344252Y2/ja
Publication of JPS61115129U publication Critical patent/JPS61115129U/ja
Application granted granted Critical
Publication of JPH0344252Y2 publication Critical patent/JPH0344252Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本廃ガス処理装置の概略図である。 １は処理室、３は空気供給用パイプ、１４はバ
イパス用パイプである。 The drawing is a schematic diagram of the present waste gas treatment device. 1 is a processing chamber, 3 is an air supply pipe, and 14 is a bypass pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 廃ガスが空気で希釈されると共に洗浄液に曝さ
れるようにした廃ガス処理手段と上記廃ガス処理
手段に異常が生じた場合に廃ガスが排出されるよ
うにしたバイパス手段とを有する廃ガス処理装置
。 Waste gas comprising a waste gas treatment means in which the waste gas is diluted with air and exposed to a cleaning liquid, and a bypass means in which the waste gas is discharged when an abnormality occurs in the waste gas treatment means. Processing equipment.
JP1984201282U 1984-12-28 1984-12-28 Expired JPH0344252Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984201282U JPH0344252Y2 (en) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984201282U JPH0344252Y2 (en) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61115129U true JPS61115129U (en) 1986-07-21
JPH0344252Y2 JPH0344252Y2 (en) 1991-09-18

Family

ID=30762924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984201282U Expired JPH0344252Y2 (en) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0344252Y2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105679A (en) * 1975-03-13 1976-09-18 Sony Corp GASUSEN JOSOCHI
JPS5327961U (en) * 1976-08-13 1978-03-09
JPS5541883A (en) * 1978-09-20 1980-03-24 Hideto Fujii Explosion preventing method and apparatus for dust collector using bag filter
JPS5657423A (en) * 1979-10-16 1981-05-19 Matsushita Electric Ind Co Ltd Central cleaner
JPS5794323A (en) * 1980-12-03 1982-06-11 Stanley Electric Co Ltd Treating method for waste gas of cvd apparatus
JPS6142321A (en) * 1984-08-06 1986-02-28 Sony Corp Apparatus for treating silane gas

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105679A (en) * 1975-03-13 1976-09-18 Sony Corp GASUSEN JOSOCHI
JPS5327961U (en) * 1976-08-13 1978-03-09
JPS5541883A (en) * 1978-09-20 1980-03-24 Hideto Fujii Explosion preventing method and apparatus for dust collector using bag filter
JPS5657423A (en) * 1979-10-16 1981-05-19 Matsushita Electric Ind Co Ltd Central cleaner
JPS5794323A (en) * 1980-12-03 1982-06-11 Stanley Electric Co Ltd Treating method for waste gas of cvd apparatus
JPS6142321A (en) * 1984-08-06 1986-02-28 Sony Corp Apparatus for treating silane gas

Also Published As

Publication number Publication date
JPH0344252Y2 (en) 1991-09-18

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