JPS63193832U - - Google Patents
Info
- Publication number
- JPS63193832U JPS63193832U JP8369887U JP8369887U JPS63193832U JP S63193832 U JPS63193832 U JP S63193832U JP 8369887 U JP8369887 U JP 8369887U JP 8369887 U JP8369887 U JP 8369887U JP S63193832 U JPS63193832 U JP S63193832U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- microwave
- cooling medium
- airtight plate
- processing furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 3
- 238000012856 packing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の一実施例に係るマイクロ波
プラズマ処理装置の要部を示す概略構成図、第２
図は従来のマイクロ波プラズマ処理装置の全体を
示す概略構成図、第３図は従来の装置の要部を示
す断面図である。
１……マイクロ波発振機（マイクロ波発振源）
、２……アイソレータ、３……パワーモニタ、４
……整合器、５……導波管、６……給電導波管、
７……気密板、８，９……Ｏリング（パツキン）
、１０……ノズル、１１……ガスボンベ（排気装
置）、１２……被処理物、１３……プラズマ処理
炉、１４……排気ポンプ（排気装置）、１８……
通路、１９，２０……ノズル。
FIG. 1 is a schematic configuration diagram showing the main parts of a microwave plasma processing apparatus according to an embodiment of the invention, and FIG.
The figure is a schematic configuration diagram showing the entire conventional microwave plasma processing apparatus, and FIG. 3 is a sectional view showing the main parts of the conventional apparatus. 1...Microwave oscillator (microwave oscillation source)
, 2...Isolator, 3...Power monitor, 4
...matching box, 5 ... waveguide, 6 ... feeding waveguide,
7...Airtight plate, 8,9...O ring (packet)
, 10... Nozzle, 11... Gas cylinder (exhaust device), 12... Processing object, 13... Plasma processing furnace, 14... Exhaust pump (exhaust device), 18...
Passage, 19, 20... nozzle.
Claims (1)
源に少なくとも導波管を介して接続されたプラズ
マ処理炉と、このプラズマ処理炉に処理ガスを供
給する処理ガス供給源と、上記プラズマ処理炉を
減圧するための排気装置と、上記プラズマ処理炉
の上記導波管接続部に設けられた誘電体製気密板
及びパツキンとを具備するマイクロ波プラズマ処
理装置において、 上記気密板のうち上記パツキンに対応する箇所
に、冷却媒体が通過する手段を設けたことを特徴
とするマイクロ波プラズマ処理装置。 (2) 上記冷却媒体が通過する手段は、上記気密
板に通路を設け、この通路に外部からノズルを介
して冷却媒体を通過させることである実用新案登
録請求の範囲第１項記載のマイクロ波プラズマ処
理装置。[Claims for Utility Model Registration] (1) A microwave oscillation source, a plasma processing furnace connected to the microwave oscillation source at least through a waveguide, and a processing gas for supplying processing gas to the plasma processing furnace. A microwave plasma processing apparatus comprising a supply source, an exhaust device for depressurizing the plasma processing furnace, and a dielectric airtight plate and packing provided at the waveguide connection portion of the plasma processing furnace, A microwave plasma processing apparatus characterized in that a means for a cooling medium to pass is provided at a location of the airtight plate corresponding to the gasket. (2) The means for the cooling medium to pass is provided with a passage in the airtight plate, and the cooling medium is passed through the passage from the outside through a nozzle. Plasma processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8369887U JPS63193832U (en) | 1987-05-30 | 1987-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8369887U JPS63193832U (en) | 1987-05-30 | 1987-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193832U true JPS63193832U (en) | 1988-12-14 |
Family
ID=30937523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8369887U Pending JPS63193832U (en) | 1987-05-30 | 1987-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193832U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02202703A (en) * | 1989-02-01 | 1990-08-10 | Hitachi Ltd | Method and device for matching microwave |
-
1987
- 1987-05-30 JP JP8369887U patent/JPS63193832U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02202703A (en) * | 1989-02-01 | 1990-08-10 | Hitachi Ltd | Method and device for matching microwave |
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