JPS6398728U - - Google Patents
Info
- Publication number
- JPS6398728U JPS6398728U JP1986194509U JP19450986U JPS6398728U JP S6398728 U JPS6398728 U JP S6398728U JP 1986194509 U JP1986194509 U JP 1986194509U JP 19450986 U JP19450986 U JP 19450986U JP S6398728 U JPS6398728 U JP S6398728U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- microwave
- transport pipe
- plasma
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 4
- 238000007664 blowing Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
第１図はこの考案の一実施例に係るマイクロ波
プラズマ処理装置を示す概略構成図、第２図ａ，
ｂはこの考案で用いるノイズの２例を示す断面図
、第３図はこの考案の変形例を示す断面図、第４
図は従来のマイクロ波プラズマ処理装置を示す概
略構成図である。
１…マイクロ波発振器（マイクロ波発振源）、
２…アイソレータ、３…パワーモニタ、４…整合
器、５…プラズマ発生炉、６…アイソレータ、７
…プラズマ発生管、１３…ガス輸送管、１４…処
理室、１６…ノズル、１７…容器状被処理物。
Fig. 1 is a schematic configuration diagram showing a microwave plasma processing apparatus according to an embodiment of the invention, Fig. 2a,
b is a sectional view showing two examples of noise used in this invention, Fig. 3 is a sectional view showing a modification of this invention, and Fig. 4 is a sectional view showing two examples of noise used in this invention.
The figure is a schematic configuration diagram showing a conventional microwave plasma processing apparatus. 1...Microwave oscillator (microwave oscillation source),
2... Isolator, 3... Power monitor, 4... Matching box, 5... Plasma generation furnace, 6... Isolator, 7
...Plasma generation tube, 13...Gas transport pipe, 14...Processing chamber, 16...Nozzle, 17...Container-shaped object to be processed.
Claims (1)
アイソレータ、方向性結合器、整合器を直列に介
して連設されたプラズマ発生炉と、このプラズマ
発生炉に貫通装着されているプラズマ発生管と、
このプラズマ発生管に連設されプラズマ発生管に
て発生した活性化ガスを輸送するガス輸送管と、
このガス輸送管に連設され被処理物に上記活性化
ガスを照射する処理室とを備えたマイクロ波プラ
ズマ処理装置において、 上記ガス輸送管の先端に上記処理室内に活性化
ガスを吹き出すノズルを設け、このノズルを伸縮
自在にして且つ移動可能に設定してなることを特
徴とするマイクロ波プラズマ処理装置。[Claims for Utility Model Registration] A microwave oscillation source, a plasma generation furnace connected to the microwave oscillation source through an isolator, a directional coupler, and a matching device in series, and a through-mounting in the plasma generation furnace. A plasma generation tube that is
A gas transport pipe that is connected to the plasma generation tube and transports the activated gas generated in the plasma generation tube;
In a microwave plasma processing apparatus equipped with a processing chamber connected to the gas transport pipe and for irradiating the activated gas onto the object to be processed, a nozzle for blowing out the activated gas into the processing chamber is provided at the tip of the gas transport pipe. A microwave plasma processing apparatus characterized in that the nozzle is configured to be extendable and movable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194509U JPH0441172Y2 (en) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194509U JPH0441172Y2 (en) | 1986-12-19 | 1986-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6398728U true JPS6398728U (en) | 1988-06-27 |
| JPH0441172Y2 JPH0441172Y2 (en) | 1992-09-28 |
Family
ID=31151549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986194509U Expired JPH0441172Y2 (en) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441172Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (en) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | Adhesive member and its production |
-
1986
- 1986-12-19 JP JP1986194509U patent/JPH0441172Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (en) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | Adhesive member and its production |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441172Y2 (en) | 1992-09-28 |