JPS5924132U - Microwave plasma processing equipment - Google Patents

Microwave plasma processing equipment

Info

Publication number
JPS5924132U
JPS5924132U JP12072982U JP12072982U JPS5924132U JP S5924132 U JPS5924132 U JP S5924132U JP 12072982 U JP12072982 U JP 12072982U JP 12072982 U JP12072982 U JP 12072982U JP S5924132 U JPS5924132 U JP S5924132U
Authority
JP
Japan
Prior art keywords
plasma generation
plasma processing
microwave
plasma
microwave plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12072982U
Other languages
Japanese (ja)
Other versions
JPS6236240Y2 (en
Inventor
篠塚　利貞
恒男 村中
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP12072982U priority Critical patent/JPS5924132U/en
Publication of JPS5924132U publication Critical patent/JPS5924132U/en
Application granted granted Critical
Publication of JPS6236240Y2 publication Critical patent/JPS6236240Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のマイクロ波プラズマ処理装置を示す断面
図、第２図はこの考案の一実施例に係るマイクロ波プラ
ズマ処理装置の要部を示す断面図である。 １・・・マイクロ波発振器（マイクロ波発振源）、−２
・・・アイソレータ、３・・・パワーモニタ、３ａ・・
・指示計、４・・・整合器、５・・・プラズマ発生炉、
５ａ・・・遮蔽筒、６・・・摺動短絡板、７・・・反応
器、７ａ・・・ガス輸送管、７ｂ・・・排気管、７Ｃ・
・・プラズマ発生管、８・・・排気装置、９・・・パツ
キン、１０・・・蓋、１１・・・被処理物、１２・・・
流量調節弁、１３・・・真空計、１４・・・高周波放電
筒（高周波発生器）。FIG. 1 is a sectional view showing a conventional microwave plasma processing apparatus, and FIG. 2 is a sectional view showing essential parts of a microwave plasma processing apparatus according to an embodiment of the invention. 1...Microwave oscillator (microwave oscillation source), -2
...Isolator, 3...Power monitor, 3a...
・Indicator, 4... Matching box, 5... Plasma generation furnace,
5a... Shield tube, 6... Sliding short circuit plate, 7... Reactor, 7a... Gas transport pipe, 7b... Exhaust pipe, 7C.
... Plasma generation tube, 8... Exhaust device, 9... Packing, 10... Lid, 11... Processing object, 12...
Flow rate control valve, 13... Vacuum gauge, 14... High frequency discharge tube (high frequency generator).

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）マイクロ波発振源と、このマイクロ波発振源の出
力部に連設されたプラズマ発生炉と、このプラズマ発生
炉に貫通装着されているプラズマ発生管と、このプラズ
マ発生管にて発生した活性化ガスを導き被処理物に活性
化ガスを照射する反応器を備えたマイクロ波プラズマ処
理装置において、 上記プラズマ発生管の近傍に高周波発生器を設けたこと
を特徴とするマイクロ波プラズマ処理装置。(1) A microwave oscillation source, a plasma generation furnace connected to the output part of the microwave oscillation source, a plasma generation tube installed through the plasma generation furnace, and a plasma generation tube installed in the plasma generation tube. A microwave plasma processing apparatus equipped with a reactor that introduces an activated gas and irradiates the object to be treated with the activated gas, characterized in that a high frequency generator is provided near the plasma generation tube. . （２）上記プラズマ発生管は複数にして、これらを一括
して上記高周波発生器の影響を与えるよう配置したこと
を特徴とする実用新案登録請求の範囲第１項記載のマイ
クロ波プラズマ処理装置。(2) The microwave plasma processing apparatus according to claim 1, wherein a plurality of the plasma generating tubes are arranged so as to be collectively influenced by the high frequency generator.
JP12072982U 1982-08-09 1982-08-09 Microwave plasma processing equipment Granted JPS5924132U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (en) 1982-08-09 1982-08-09 Microwave plasma processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12072982U JPS5924132U (en) 1982-08-09 1982-08-09 Microwave plasma processing equipment

Publications (2)

Publication Number Publication Date
JPS5924132U true JPS5924132U (en) 1984-02-15
JPS6236240Y2 JPS6236240Y2 (en) 1987-09-14

Family

ID=30276581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12072982U Granted JPS5924132U (en) 1982-08-09 1982-08-09 Microwave plasma processing equipment

Country Status (1)

Country Link
JP (1) JPS5924132U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226027A (en) * 1983-06-07 1984-12-19 Toyota Motor Corp Plasma treatment
JPH02151021A (en) * 1988-12-02 1990-06-11 Agency Of Ind Science & Technol Plasma processing and deposition apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221332U (en) * 1975-08-01 1977-02-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221332U (en) * 1975-08-01 1977-02-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59226027A (en) * 1983-06-07 1984-12-19 Toyota Motor Corp Plasma treatment
JPH02151021A (en) * 1988-12-02 1990-06-11 Agency Of Ind Science & Technol Plasma processing and deposition apparatus

Also Published As

Publication number Publication date
JPS6236240Y2 (en) 1987-09-14

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