JPS5969966U - Glow discharge generator - Google Patents
Glow discharge generatorInfo
- Publication number
- JPS5969966U JPS5969966U JP16684682U JP16684682U JPS5969966U JP S5969966 U JPS5969966 U JP S5969966U JP 16684682 U JP16684682 U JP 16684682U JP 16684682 U JP16684682 U JP 16684682U JP S5969966 U JPS5969966 U JP S5969966U
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- discharge generator
- frequency
- vacuum tube
- exhaust chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はグロー放電発生装置の一例として示した高周波
イオンブレーティング装置の概略図、第２図は本考案の
一実施例を示した高周波イオンブレーティング装置の概
略図である。
１・・・・・・排気室、４・・・・・・高周波電極、８
・・・・・・高周波電源、１１・・・・・・真空管発信
機、１９・・・・・・プレー・ト電流検出回路、２０・
・・・・・比較回路。FIG. 1 is a schematic diagram of a high frequency ion blating device shown as an example of a glow discharge generating device, and FIG. 2 is a schematic diagram of a high frequency ion blating device showing an embodiment of the present invention. 1...Exhaust chamber, 4...High frequency electrode, 8
......High frequency power supply, 11... Vacuum tube transmitter, 19... Plate current detection circuit, 20.
...Comparison circuit.
Claims (1)
周波電力を該電極に印加することにより該排気室内に高
周波グロー放電を発生出来る様になし、前記真空管発振
器に流れるプレート電流を検出し、該検出値に基づいて
グロー放電の有無を検出する様になしたグロー放電発生
装置。A high-frequency electrode is placed in the exhaust chamber, and high-frequency glow discharge is generated in the exhaust chamber by applying high-frequency power from a vacuum tube oscillator to the electrode, and a plate current flowing through the vacuum tube oscillator is detected. A glow discharge generator that detects the presence or absence of glow discharge based on a detected value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684682U JPS5969966U (en) | 1982-11-02 | 1982-11-02 | Glow discharge generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684682U JPS5969966U (en) | 1982-11-02 | 1982-11-02 | Glow discharge generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5969966U true JPS5969966U (en) | 1984-05-12 |
| JPS6135561Y2 JPS6135561Y2 (en) | 1986-10-16 |
Family
ID=30365180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16684682U Granted JPS5969966U (en) | 1982-11-02 | 1982-11-02 | Glow discharge generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5969966U (en) |
-
1982
- 1982-11-02 JP JP16684682U patent/JPS5969966U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6135561Y2 (en) | 1986-10-16 |
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