JPS59178898U - plasma generator - Google Patents
plasma generatorInfo
- Publication number
- JPS59178898U JPS59178898U JP7272483U JP7272483U JPS59178898U JP S59178898 U JPS59178898 U JP S59178898U JP 7272483 U JP7272483 U JP 7272483U JP 7272483 U JP7272483 U JP 7272483U JP S59178898 U JPS59178898 U JP S59178898U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust chamber
- plasma
- plate
- generated
- plasma generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はプラズマ発生装置の一例として示した高周波イ
オンブレーティング装置の概略図、第２図は本考案の一
実施例を示した高周波イオンブレーティング装置の概略
図である。
１：排気室、４：高周波電極、７：整合回路、８：高周
波電源、１１：真空管発信機、１３ニブレート電源、１
９ニブレ一ト電流検出回路、２０：比較回路、２１：制
御回路、２２ニゲリツト電流、検出回路、２３：比較回
路、２４：表示装置。FIG. 1 is a schematic diagram of a high frequency ion blating device shown as an example of a plasma generating device, and FIG. 2 is a schematic diagram of a high frequency ion blating device showing one embodiment of the present invention. 1: Exhaust chamber, 4: High frequency electrode, 7: Matching circuit, 8: High frequency power supply, 11: Vacuum tube transmitter, 13 Nibrate power supply, 1
9 nigerit current detection circuit, 20: comparison circuit, 21: control circuit, 22 nigerit current detection circuit, 23: comparison circuit, 24: display device.
Claims (1)
周波電力を整合回路を介して該電極に印加することによ
り該排気室内にプラズマを発生出来る様になした装置に
おいて、前記真空管発振機に流れるプレート電流及びも
しくはグリッド電流を検出する手段、該プレート電流及
びもしくはグリッド電流が基準値以上流れたとき、前記
発信機のプレート電源をオフさせる信号を発生する手段
を設けたプラズマ発生装置。In an apparatus in which a high-frequency electrode is arranged in an exhaust chamber, and plasma is generated in the exhaust chamber by applying high-frequency power from a vacuum tube oscillator to the electrode via a matching circuit, the plasma is generated in the exhaust chamber. A plasma generation device comprising: means for detecting a plate current and/or a grid current; and means for generating a signal for turning off the plate power source of the transmitter when the plate current and/or the grid current flows in excess of a reference value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7272483U JPS59178898U (en) | 1983-05-16 | 1983-05-16 | plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7272483U JPS59178898U (en) | 1983-05-16 | 1983-05-16 | plasma generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59178898U true JPS59178898U (en) | 1984-11-29 |
| JPH0241168Y2 JPH0241168Y2 (en) | 1990-11-01 |
Family
ID=30202858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7272483U Granted JPS59178898U (en) | 1983-05-16 | 1983-05-16 | plasma generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178898U (en) |
-
1983
- 1983-05-16 JP JP7272483U patent/JPS59178898U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241168Y2 (en) | 1990-11-01 |
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