JPS6319745U - - Google Patents
Info
- Publication number
- JPS6319745U JPS6319745U JP10926486U JP10926486U JPS6319745U JP S6319745 U JPS6319745 U JP S6319745U JP 10926486 U JP10926486 U JP 10926486U JP 10926486 U JP10926486 U JP 10926486U JP S6319745 U JPS6319745 U JP S6319745U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- coil
- power
- ion source
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001629 suppression Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例のイオン源動作用結
線図である。
１……高用周波電源、４……マツチング回路、
５……真空容器、６……マイル、７……加速電極
、８……電子抑制電極、９……加速電源、１０…
…電子抑制電源。
FIG. 1 is a wiring diagram for operating an ion source according to an embodiment of the present invention. 1...High frequency power supply, 4...Matching circuit,
5... Vacuum container, 6... Mile, 7... Accelerating electrode, 8... Electron suppression electrode, 9... Accelerating power source, 10...
...electronic suppression power supply.
Claims (1)
にコイルを配置し、このコイルに高周波電力を供
給してオン種となるガスをプラズマ化するイオン
源において、電力を供給する高周波電源を商用周
波側で絶縁し、電源全体をほぼ加速電極の電位で
動作させたことを特徴とする高周波イオン源。 In an ion source where a coil is placed inside or outside a container that generates plasma and high-frequency power is supplied to this coil to turn on-species gas into plasma, the high-frequency power supply that supplies the power is isolated on the commercial frequency side. A high-frequency ion source characterized in that the entire power source is operated at approximately the potential of the accelerating electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926486U JPS6319745U (en) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926486U JPS6319745U (en) | 1986-07-18 | 1986-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6319745U true JPS6319745U (en) | 1988-02-09 |
Family
ID=30987200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10926486U Pending JPS6319745U (en) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6319745U (en) |
-
1986
- 1986-07-18 JP JP10926486U patent/JPS6319745U/ja active Pending
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