JPS59126500U - Diffusion prevention device for plasma generator - Google Patents

Diffusion prevention device for plasma generator

Info

Publication number
JPS59126500U
JPS59126500U JP1956283U JP1956283U JPS59126500U JP S59126500 U JPS59126500 U JP S59126500U JP 1956283 U JP1956283 U JP 1956283U JP 1956283 U JP1956283 U JP 1956283U JP S59126500 U JPS59126500 U JP S59126500U
Authority
JP
Japan
Prior art keywords
reaction tube
plasma
prevention device
diffusion prevention
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1956283U
Other languages
Japanese (ja)
Other versions
JPH0231760Y2 (en
Inventor
泉　昭一郎
狩野　利一
Original Assignee
株式会社日立国際電気
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立国際電気 filed Critical 株式会社日立国際電気
Priority to JP1956283U priority Critical patent/JPS59126500U/en
Publication of JPS59126500U publication Critical patent/JPS59126500U/en
Application granted granted Critical
Publication of JPH0231760Y2 publication Critical patent/JPH0231760Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案を実施した石英反応管を用いたプラズマ
発生装置の構成側図、第２図は第１図の１部を用いたプ
ラズマの説明図である。 １・・・高周波発振機、２・・・プラズマ発生用電極、
３・・・石英反応管、４・・・プラズマ遮蔽電極、５・
・・圧力センサ、６・・・排気ポンプ、７・・・プラズ
マ。FIG. 1 is a side view of the configuration of a plasma generator using a quartz reaction tube embodying the present invention, and FIG. 2 is an explanatory diagram of plasma using a part of FIG. 1. 1... High frequency oscillator, 2... Plasma generation electrode,
3... Quartz reaction tube, 4... Plasma shielding electrode, 5...
...Pressure sensor, 6...Exhaust pump, 7...Plasma.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 石英管状反応管とその外周管壁に沿って巻付けたプラズ
マ発生電極と反応管内の反応域前後の配管に取付けた圧
力センサを有するプラズマ発生装置において、反応管の
長さに沿うプラズマ発生領域両端近くに反応管に近接し
てベルト状に取巻き、相互の距離を可変とした１点接地
の金属帯状遮蔽電極板１対を設け、プラズマ領域の必要
でない区域への拡散防止を図ったことを特徴とするプラ
ズマ発生装置の拡散防止装置。In a plasma generation device that has a quartz tubular reaction tube, a plasma generation electrode wrapped around the outer wall of the tube, and a pressure sensor attached to the piping before and after the reaction zone in the reaction tube, the plasma generation area is located at both ends of the reaction tube along the length of the reaction tube. A pair of metal band-shaped shielding electrode plates are installed near the reaction tube in a belt-like manner and are grounded at one point, with a variable distance between them, in order to prevent the plasma from dispersing to areas where it is not needed. Diffusion prevention device for plasma generator.
JP1956283U 1983-02-15 1983-02-15 Diffusion prevention device for plasma generator Granted JPS59126500U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1956283U JPS59126500U (en) 1983-02-15 1983-02-15 Diffusion prevention device for plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1956283U JPS59126500U (en) 1983-02-15 1983-02-15 Diffusion prevention device for plasma generator

Publications (2)

Publication Number Publication Date
JPS59126500U true JPS59126500U (en) 1984-08-25
JPH0231760Y2 JPH0231760Y2 (en) 1990-08-28

Family

ID=30150705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1956283U Granted JPS59126500U (en) 1983-02-15 1983-02-15 Diffusion prevention device for plasma generator

Country Status (1)

Country Link
JP (1) JPS59126500U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193726A (en) * 1982-05-08 1983-11-11 Ushio Inc Vapor deposition method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193726A (en) * 1982-05-08 1983-11-11 Ushio Inc Vapor deposition method

Also Published As

Publication number Publication date
JPH0231760Y2 (en) 1990-08-28

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