JPS5950440U - Microwave plasma processing equipment - Google Patents
Microwave plasma processing equipmentInfo
- Publication number
- JPS5950440U JPS5950440U JP11346183U JP11346183U JPS5950440U JP S5950440 U JPS5950440 U JP S5950440U JP 11346183 U JP11346183 U JP 11346183U JP 11346183 U JP11346183 U JP 11346183U JP S5950440 U JPS5950440 U JP S5950440U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- microwave plasma
- processing equipment
- chamber
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例の概略説明図である。
図に於いて、１は処理室、２は排気管、３はガス供給管
、４は蓋板、５は半導体ウェハ、６は空洞室、７はアン
テナ、８．９は磁石である。The figure is a schematic explanatory diagram of an embodiment of the present invention. In the figure, 1 is a processing chamber, 2 is an exhaust pipe, 3 is a gas supply pipe, 4 is a lid plate, 5 is a semiconductor wafer, 6 is a cavity chamber, 7 is an antenna, and 8.9 is a magnet.
Claims (1)
室を貫通して外部に導出された近傍にそれ等管を取巻く
磁石が設置されてなることを特徴とするマイクロ波プラ
ズマ処理装置。A microwave plasma processing apparatus characterized in that a magnet surrounding an exhaust pipe and a gas supply pipe attached to a processing chamber is installed near the pipes that pass through a cavity chamber and are led out to the outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11346183U JPS5950440U (en) | 1983-07-21 | 1983-07-21 | Microwave plasma processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11346183U JPS5950440U (en) | 1983-07-21 | 1983-07-21 | Microwave plasma processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5950440U true JPS5950440U (en) | 1984-04-03 |
Family
ID=30262644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11346183U Pending JPS5950440U (en) | 1983-07-21 | 1983-07-21 | Microwave plasma processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950440U (en) |
-
1983
- 1983-07-21 JP JP11346183U patent/JPS5950440U/en active Pending
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