JPS60103142U - Bernoulli type semiconductor substrate transfer equipment - Google Patents
Bernoulli type semiconductor substrate transfer equipmentInfo
- Publication number
- JPS60103142U JPS60103142U JP19394583U JP19394583U JPS60103142U JP S60103142 U JPS60103142 U JP S60103142U JP 19394583 U JP19394583 U JP 19394583U JP 19394583 U JP19394583 U JP 19394583U JP S60103142 U JPS60103142 U JP S60103142U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- type semiconductor
- substrate transfer
- transfer equipment
- bernoulli
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のベルヌイ型半導体基板搬送装置の吸着カ
ップ詳細図、第２図、第３図は本考案の一実施例の二つ
の状態を説明する吸着カップ詳細図である。
１・・・・・・吸着カップ、２・・・・・・吸着カップ
の天井面、３・・・・・・ステー、４・・・・・・ガス
噴出口。FIG. 1 is a detailed view of a suction cup of a conventional Bernoulli type semiconductor substrate transfer apparatus, and FIGS. 2 and 3 are detailed views of a suction cup illustrating two states of an embodiment of the present invention. 1... Suction cup, 2... Ceiling surface of the suction cup, 3... Stay, 4... Gas outlet.
Claims (1)
体基板を吸着するベルヌイ型半導体基板搬送装置におい
て、前記ガス噴出口の周囲に、該ガス噴出口から間隔を
置いて半導体基板の周辺を支える耐熱性のステーを配設
したことを特徴とするベルヌイ型半導体基板搬送装置。 ゛[Claims for Utility Model Registration] In a Bernoulli-type semiconductor substrate transfer device that has a gas outlet at the center of the ceiling surface of a suction cup and which sucks a semiconductor substrate, a space is provided around the gas outlet from the gas outlet. A Bernoulli-type semiconductor substrate transfer device characterized by having a heat-resistant stay that supports the periphery of a semiconductor substrate.゛
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19394583U JPS60103142U (en) | 1983-12-16 | 1983-12-16 | Bernoulli type semiconductor substrate transfer equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19394583U JPS60103142U (en) | 1983-12-16 | 1983-12-16 | Bernoulli type semiconductor substrate transfer equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60103142U true JPS60103142U (en) | 1985-07-13 |
Family
ID=30417011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19394583U Pending JPS60103142U (en) | 1983-12-16 | 1983-12-16 | Bernoulli type semiconductor substrate transfer equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60103142U (en) |
-
1983
- 1983-12-16 JP JP19394583U patent/JPS60103142U/en active Pending
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