JPS5933240U - centrifugal dryer - Google Patents

centrifugal dryer

Info

Publication number
JPS5933240U
JPS5933240U JP12988782U JP12988782U JPS5933240U JP S5933240 U JPS5933240 U JP S5933240U JP 12988782 U JP12988782 U JP 12988782U JP 12988782 U JP12988782 U JP 12988782U JP S5933240 U JPS5933240 U JP S5933240U
Authority
JP
Japan
Prior art keywords
centrifugal dryer
turntable
box body
box
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12988782U
Other languages
Japanese (ja)
Inventor
秋草　誠
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP12988782U priority Critical patent/JPS5933240U/en
Publication of JPS5933240U publication Critical patent/JPS5933240U/en
Pending legal-status Critical Current

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  • Drying Of Solid Materials (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の遠心乾燥機の概略断面図、第２図はこの
考案の一実施例の遠心乾燥機の概略断面図である。 １・・・箱体、２・・・開口、３・・・ターンテーブル
、４・・・半導体ウェーハ、５・・・キャリヤ、６・・
・イオナイザ。FIG. 1 is a schematic sectional view of a conventional centrifugal dryer, and FIG. 2 is a schematic sectional view of a centrifugal dryer according to an embodiment of this invention. DESCRIPTION OF SYMBOLS 1... Box body, 2... Opening, 3... Turntable, 4... Semiconductor wafer, 5... Carrier, 6...
・Ionizer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 箱体と、箱体内で回転せしめられるターンテーブルと、
ターンテーブルの周縁上に等間隔で支持固定され多数の
半導体ウェーハを水平方向に支持した複数個のキャリヤ
とを備えるものにおいて、前記箱体内へイオン化された
気体を供給する手段を設けたことを特徴とする遠心乾燥
機。A box body, a turntable that is rotated within the box body,
A device comprising a plurality of carriers supporting and fixing a plurality of semiconductor wafers horizontally at equal intervals on the periphery of a turntable, characterized in that a means for supplying ionized gas into the box is provided. Centrifugal dryer.
JP12988782U 1982-08-27 1982-08-27 centrifugal dryer Pending JPS5933240U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12988782U JPS5933240U (en) 1982-08-27 1982-08-27 centrifugal dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12988782U JPS5933240U (en) 1982-08-27 1982-08-27 centrifugal dryer

Publications (1)

Publication Number Publication Date
JPS5933240U true JPS5933240U (en) 1984-03-01

Family

ID=30294156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12988782U Pending JPS5933240U (en) 1982-08-27 1982-08-27 centrifugal dryer

Country Status (1)

Country Link
JP (1) JPS5933240U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220441U (en) * 1988-07-26 1990-02-09
JP2014190592A (en) * 2013-03-27 2014-10-06 Hitachi Metals Ltd Drier for drying process object accommodated in cylindrical barrel

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918614U (en) * 1972-05-20 1974-02-16
JPS5016871B2 (en) * 1972-03-24 1975-06-17
JPS5212381B1 (en) * 1966-08-22 1977-04-06
JPS5528419A (en) * 1978-08-16 1980-02-29 Ihara Chikuro Kogyo Kk Conveyor of matter to be incinerated in incinerator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212381B1 (en) * 1966-08-22 1977-04-06
JPS5016871B2 (en) * 1972-03-24 1975-06-17
JPS4918614U (en) * 1972-05-20 1974-02-16
JPS5528419A (en) * 1978-08-16 1980-02-29 Ihara Chikuro Kogyo Kk Conveyor of matter to be incinerated in incinerator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220441U (en) * 1988-07-26 1990-02-09
JP2014190592A (en) * 2013-03-27 2014-10-06 Hitachi Metals Ltd Drier for drying process object accommodated in cylindrical barrel

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