JPS59143045U - Rinser dryer equipment - Google Patents
Rinser dryer equipmentInfo
- Publication number
- JPS59143045U JPS59143045U JP3649683U JP3649683U JPS59143045U JP S59143045 U JPS59143045 U JP S59143045U JP 3649683 U JP3649683 U JP 3649683U JP 3649683 U JP3649683 U JP 3649683U JP S59143045 U JPS59143045 U JP S59143045U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rinser dryer
- holder
- rinser
- dryer equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のリンサードライヤ装置の概要を示す図、
第２図は処理槽内におけるホルダーボックス配置を示す
平面図、第３図、第４図は基板を収容するホルダーの従
来例を示す斜視図、第５図は本考案の一実施例であるホ
ルダーボックスを示す斜視図、第６図は第５図で示すホ
ルダーホックスとホルダーとの関係を示す平面図である
。図に □おいて、１１・・・ホルダーボックス
、１２・・・突起、１３．１５・・・支柱、１６・・・
基板。Figure 1 is a diagram showing an outline of a conventional rinser dryer device.
Fig. 2 is a plan view showing the arrangement of holder boxes in the processing tank, Figs. 3 and 4 are perspective views showing conventional examples of holders that accommodate substrates, and Fig. 5 is a holder that is an embodiment of the present invention. FIG. 6 is a perspective view showing the box, and FIG. 6 is a plan view showing the relationship between the holder hook and the holder shown in FIG. In the figure □, 11...Holder box, 12...Protrusion, 13.15...Strut, 16...
substrate.
Claims (1)
転する処理槽とキャリアガス導入口を備えた蓋板とで構
成されるリンサードライヤ装置であって、該ホルダーボ
ックスの背面に複数の突起を設け、該突起により該試料
を収容するホルダーの支柱を支持せしめ該試料の脱落防
止手段としたことを特徴とするリンサードライヤ装置。A rinser dryer device having a holder box for accommodating a sample to be processed, and consisting of a processing tank rotating at high speed and a lid plate equipped with a carrier gas inlet, the holder box having a plurality of protrusions on the back surface. A rinser dryer device, characterized in that the protrusion supports a column of a holder that accommodates the sample, and serves as a means for preventing the sample from falling off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649683U JPS59143045U (en) | 1983-03-14 | 1983-03-14 | Rinser dryer equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649683U JPS59143045U (en) | 1983-03-14 | 1983-03-14 | Rinser dryer equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59143045U true JPS59143045U (en) | 1984-09-25 |
| JPS6233315Y2 JPS6233315Y2 (en) | 1987-08-26 |
Family
ID=30167166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3649683U Granted JPS59143045U (en) | 1983-03-14 | 1983-03-14 | Rinser dryer equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59143045U (en) |
-
1983
- 1983-03-14 JP JP3649683U patent/JPS59143045U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6233315Y2 (en) | 1987-08-26 |
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