JPS59166443U - centrifugal dryer - Google Patents
centrifugal dryerInfo
- Publication number
- JPS59166443U JPS59166443U JP6259683U JP6259683U JPS59166443U JP S59166443 U JPS59166443 U JP S59166443U JP 6259683 U JP6259683 U JP 6259683U JP 6259683 U JP6259683 U JP 6259683U JP S59166443 U JPS59166443 U JP S59166443U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- centrifugal dryer
- carrier
- wafers
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の遠心乾燥機の蓋を除去した平面図である
。第２図は第１の遠心乾燥機の■−■線に沿う断面図で
ある。第３図は従来の遠心乾燥機の欠点について説明す
るための要部拡大横断面図である。第４図はこの考案の
一実施例の遠心乾燥機の要部横断面図である。第５図は
第４図の遠心乾燥機の■−■線に沿う断面図である。第
６図は第４図の遠心乾燥機においてターンテーブルを高
速回転させた場合の要部拡大横断面図である。第７図は
この考案の他の実施例の遠心乾燥機の要部拡大横断面図
である。第８図は第７図の遠心乾燥機においてターンテ
ーブルを高速回転させた場合の要部拡大横断面図である
。
１・・・・・・乾燥機本体、３・・−・・・ターンテー
ブル、４・・・・・・キャリヤホルダ、５・・・・・・
キャリヤ、６・・・・・・ウェーハ、１０．２０・・・
・・・ウェーハ押圧手段。
第３図
第４図
ＩＶ ／ （
＼ −
ｒ にで１
５ａ ６ ５ｂ
／（１
５ａ ６ ５ｂ
ｌ ｔ ＩFIG. 1 is a plan view of a conventional centrifugal dryer with the lid removed. FIG. 2 is a sectional view of the first centrifugal dryer taken along the line ■-■. FIG. 3 is an enlarged cross-sectional view of a main part for explaining the drawbacks of a conventional centrifugal dryer. FIG. 4 is a cross-sectional view of essential parts of a centrifugal dryer according to an embodiment of this invention. FIG. 5 is a cross-sectional view of the centrifugal dryer shown in FIG. 4 taken along the line ■-■. FIG. 6 is an enlarged cross-sectional view of essential parts of the centrifugal dryer of FIG. 4 when the turntable is rotated at high speed. FIG. 7 is an enlarged cross-sectional view of the essential parts of a centrifugal dryer according to another embodiment of this invention. FIG. 8 is an enlarged cross-sectional view of essential parts of the centrifugal dryer shown in FIG. 7 when the turntable is rotated at high speed. 1...Dryer body, 3...Turntable, 4...Carrier holder, 5...
Carrier, 6...Wafer, 10.20...
...Wafer pressing means. Fig. 3 Fig. 4
Claims (1)
状に収納したキャリヤを固定し、前記ターンチーフルを
高速回転させてウェーハに付着している水分を遠心力に
よって振り切るようにした遠心乾燥機において、 前記ウェーハの外方部にターンテーブルの回転に伴って
相対的にキャリヤの内方に向って移動するウェーハ押圧
手段を設けたことを特徴とする遠心乾燥機。[Claims for Utility Model Registration] A carrier in which a large number of wafers are stored horizontally at a predetermined pitch is fixed on a turntable, and the turntable is rotated at high speed to shake off moisture adhering to the wafers by centrifugal force. A centrifugal dryer according to the present invention, characterized in that a wafer pressing means is provided on the outer side of the wafer and moves relatively inward of the carrier as the turntable rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259683U JPS59166443U (en) | 1983-04-25 | 1983-04-25 | centrifugal dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259683U JPS59166443U (en) | 1983-04-25 | 1983-04-25 | centrifugal dryer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59166443U true JPS59166443U (en) | 1984-11-08 |
Family
ID=30192787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6259683U Pending JPS59166443U (en) | 1983-04-25 | 1983-04-25 | centrifugal dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59166443U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106135A (en) * | 1983-11-15 | 1985-06-11 | Fujitsu Ltd | Drying device |
-
1983
- 1983-04-25 JP JP6259683U patent/JPS59166443U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60106135A (en) * | 1983-11-15 | 1985-06-11 | Fujitsu Ltd | Drying device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS59166443U (en) | centrifugal dryer | |
| JPS60141129U (en) | Terminal structure of leadless chip carrier | |
| JPH02118930U (en) | ||
| JPS5933240U (en) | centrifugal dryer | |
| JPS60109327U (en) | Semiconductor wafer support mechanism for semiconductor ion implantation equipment | |
| JPS58499U (en) | Semiconductor device carrier | |
| JPS5933913U (en) | panel base | |
| JPS58148979U (en) | magnetic dustproof lid | |
| JPS58176208U (en) | Disc with animation | |
| JPS6117732U (en) | centrifugal dryer | |
| JPS5963916U (en) | flexible cable | |
| JPS59107723U (en) | disk fixing device | |
| JPS6042757U (en) | hybrid circuit module | |
| JPS6082753U (en) | Recording medium clamp mechanism | |
| JPS5922476U (en) | Electrical laminate | |
| JPS58191902U (en) | lathe | |
| JPS6132077U (en) | Tray for transporting semiconductor wafers | |
| JPS5954928U (en) | Lead frame fixing device | |
| JPS59149287U (en) | Recording disc clamping device | |
| JPS5954943U (en) | Semiconductor hybrid integrated circuit device | |
| JPS5885739U (en) | Washer for switch rotation | |
| JPS5993169U (en) | LSI adapter | |
| JPS5951059U (en) | plating jig | |
| JPS58106069U (en) | A device to remove dust etc. from clothes etc. | |
| JPS5863753U (en) | semiconductor wafer carrier |