JPS59111042U - semiconductor manufacturing equipment - Google Patents
semiconductor manufacturing equipmentInfo
- Publication number
- JPS59111042U JPS59111042U JP494083U JP494083U JPS59111042U JP S59111042 U JPS59111042 U JP S59111042U JP 494083 U JP494083 U JP 494083U JP 494083 U JP494083 U JP 494083U JP S59111042 U JPS59111042 U JP S59111042U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor manufacturing
- manufacturing equipment
- levitates
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のフォトレジスト膜の形成に用いられてい
る半導体製造装置の正面図である。第２図はこの考案の
一実施例の半導体製造装置の平面図である。第３図は第
２図の装置の■−■線に沿う断面図である。FIG. 1 is a front view of a semiconductor manufacturing apparatus used for forming a conventional photoresist film. FIG. 2 is a plan view of a semiconductor manufacturing apparatus according to an embodiment of this invention. FIG. 3 is a cross-sectional view of the device shown in FIG. 2 taken along the line ■--■.
Claims (1)
上せしめられるウェーハと、このウェーハの周囲に配置
され浮上したウェーハを定位置に保持したまま回転せし
める複数個の回転ローラとを備えてなる半導体製造装置
。A semiconductor manufacturing device comprising: a gas blow-up unit that levitates a wafer; a wafer that levitates above the wafer; and a plurality of rotating rollers arranged around the wafer that rotate the levitated wafer while holding it in a fixed position. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP494083U JPS59111042U (en) | 1983-01-17 | 1983-01-17 | semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP494083U JPS59111042U (en) | 1983-01-17 | 1983-01-17 | semiconductor manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59111042U true JPS59111042U (en) | 1984-07-26 |
Family
ID=30136539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP494083U Pending JPS59111042U (en) | 1983-01-17 | 1983-01-17 | semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59111042U (en) |
-
1983
- 1983-01-17 JP JP494083U patent/JPS59111042U/en active Pending
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