JPS59152738U - Wafer positioning device - Google Patents
Wafer positioning deviceInfo
- Publication number
- JPS59152738U JPS59152738U JP4739283U JP4739283U JPS59152738U JP S59152738 U JPS59152738 U JP S59152738U JP 4739283 U JP4739283 U JP 4739283U JP 4739283 U JP4739283 U JP 4739283U JP S59152738 U JPS59152738 U JP S59152738U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reference surface
- rotating roller
- positioning device
- wafer positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Registering Or Overturning Sheets (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例による装置の平面図、第２図は
第１図の側面図、第３図は第１図の装置の内部を含む要
部を示す平面図、第４図は第３図のＡ矢視部分側面図、
第５図は第３図のＢ矢視部分側面図、第６図は半導体ウ
ェハーの一例を示す平面図、第７図はウェハの保持状態
を示す平面図、である。
〔主要部分の符号の説明）、３７１，３７２・・・・・
・基準面部材、３７ａ、３７ｂ・・・・・・ピン。
第２図
第４凶FIG. 1 is a plan view of a device according to an embodiment of the present invention, FIG. 2 is a side view of FIG. 1, FIG. 3 is a plan view showing the main parts including the inside of the device of FIG. A partial side view in the direction of arrow A in Fig. 3;
5 is a partial side view taken in the direction of arrow B in FIG. 3, FIG. 6 is a plan view showing an example of a semiconductor wafer, and FIG. 7 is a plan view showing a state in which the wafer is held. [Explanation of symbols of main parts], 371, 372...
・Reference surface member, 37a, 37b...Pin. Figure 2 4th evil
Claims (1)
ーのオリエンテーション・フラットに当接する基準面と
、ウェハーのオリエンテーション・フラットが前記基準
面に当接した時にウェハーの外周部との係接を断つ位置
に配設された回転ローラとを保持し、該回転ローラもし
くは前記基準面にてウェハーを上記左右のローラに押圧
する如（付勢された位置決め部材を有するウェハーの位
置決め装置において； 前記基準面を前記回転ローラの左右に配設した一対の基
準面部材に形成し、該基準面部材を前記回転ローラの方
向に回転する如く前記位置決め部材に植設したピンに嵌
合せしめたことを特徴とする位置決め装置。[Claims for Utility Model Registration] Left and right rollers that engage the outer circumference of the wafer, a reference surface that abuts the orientation flat of the wafer, and the outer circumference of the wafer when the orientation flat of the wafer abuts the reference surface. A rotating roller disposed at a position where the wafer is disengaged from the wafer is held at a position where the wafer is pressed against the left and right rollers using the rotating roller or the reference surface (positioning of the wafer with the biased positioning member is performed). In the apparatus; the reference surface is formed as a pair of reference surface members disposed on the left and right sides of the rotating roller, and the reference surface members are fitted to pins implanted in the positioning member so as to rotate in the direction of the rotating roller. A positioning device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4739283U JPS59152738U (en) | 1983-03-31 | 1983-03-31 | Wafer positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4739283U JPS59152738U (en) | 1983-03-31 | 1983-03-31 | Wafer positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59152738U true JPS59152738U (en) | 1984-10-13 |
Family
ID=30177940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4739283U Pending JPS59152738U (en) | 1983-03-31 | 1983-03-31 | Wafer positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59152738U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62244844A (en) * | 1986-04-15 | 1987-10-26 | Matsushita Electric Ind Co Ltd | Parts holding method |
-
1983
- 1983-03-31 JP JP4739283U patent/JPS59152738U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62244844A (en) * | 1986-04-15 | 1987-10-26 | Matsushita Electric Ind Co Ltd | Parts holding method |
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