JPS5823810U - Semiconductor wafer transport mechanism - Google Patents
Semiconductor wafer transport mechanismInfo
- Publication number
- JPS5823810U JPS5823810U JP11692981U JP11692981U JPS5823810U JP S5823810 U JPS5823810 U JP S5823810U JP 11692981 U JP11692981 U JP 11692981U JP 11692981 U JP11692981 U JP 11692981U JP S5823810 U JPS5823810 U JP S5823810U
- Authority
- JP
- Japan
- Prior art keywords
- transport mechanism
- semiconductor wafer
- wafer transport
- belts
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Structure Of Belt Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａ、 ｂは従来の半導体ウェーハの搬送機構の一
例の平面図および側面図、第２図は本考案の一実施例の
平面図、第３図乃至第７［ｆｆｌは本考案の実施例の平
面図である。
１、 １’、 ２． ２’・・・・・・ベルト、３．
３’、４・・・・・・プーリ、５・・・・・・半導体ウ
ェーハ、６・・・・・・ホトレジスト剤、７． ７’−
−−−−−ガイド、８． ８’、 ９゜９’、 １
０． １０’ ・・・・・・プーリ。1A and 1B are a plan view and a side view of an example of a conventional semiconductor wafer transport mechanism, FIG. 2 is a plan view of an embodiment of the present invention, and FIGS. FIG. 3 is a plan view of an example. 1, 1', 2. 2'...Belt, 3.
3', 4... Pulley, 5... Semiconductor wafer, 6... Photoresist agent, 7. 7'-
----- Guide, 8. 8', 9°9', 1
0. 10'...Pulley.
Claims (1)
同一方向に走行し、前記２本のベルトの上に半導体ウェ
ーハが乗せられて搬送される半導体ウェーハの搬送機構
において、前記２本のベルトが作る平面内にて前記ベル
トの走行方向に、対して前記ベルトの各々が傾角をなし
て走行するように前記２本のベルトの各々に接するプー
リを付加したことを特徴とする半導体ウェーハの搬送機
構。In a semiconductor wafer transport mechanism in which two O-ring-shaped belts are spaced apart and run approximately in parallel in the same direction, and a semiconductor wafer is placed on the two belts and transported, the two A semiconductor device characterized in that a pulley is added that contacts each of the two belts so that each of the belts runs at an inclined angle with respect to the running direction of the belt within a plane formed by the book belt. Wafer transport mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11692981U JPS5823810U (en) | 1981-08-05 | 1981-08-05 | Semiconductor wafer transport mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11692981U JPS5823810U (en) | 1981-08-05 | 1981-08-05 | Semiconductor wafer transport mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5823810U true JPS5823810U (en) | 1983-02-15 |
Family
ID=29911137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11692981U Pending JPS5823810U (en) | 1981-08-05 | 1981-08-05 | Semiconductor wafer transport mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5823810U (en) |
-
1981
- 1981-08-05 JP JP11692981U patent/JPS5823810U/en active Pending
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