JPS5871036U

JPS5871036U - Conveyance device

Info

Publication number: JPS5871036U
Application number: JP16718581U
Authority: JP
Inventors: 靖中村
Original assignee: 日本電気ホームエレクトロニクス株式会社
Priority date: 1981-11-09
Filing date: 1981-11-09
Publication date: 1983-05-14

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図及び第２図は従来の搬送装置の要部平面図及び側
面図、第３図は第１図のＩ−Ｉ線に沿う断面図、第４図
は他の従来の搬送装置の要部平面図、第５図及び第６図
は第４図の■−■線及び■−■線に沿う断面図、第７図
は本考案の一例を示す一部省略側面図、第８図は第７図
のＩＶ−ＩＶ線に沿う拡大断面図、第９図は本考案の変
形例を示す要部断面図である。２・・・・・・被搬送物（半導体ウェーハ）、６，６・
・・・・・搬送ベルト、ｍ、　ｍ・・・・・・対向テー
パ面。 −当　　（’　ｓ−７％１」−1 and 2 are a plan view and a side view of main parts of a conventional conveying device, FIG. 3 is a sectional view taken along line I-I in FIG. 1, and FIG. 4 is a main part of another conventional conveying device. 5 and 6 are cross-sectional views taken along the lines ■-■ and ■-■ in FIG. 4, FIG. 7 is a partially omitted side view showing an example of the present invention, and FIG. FIG. 7 is an enlarged sectional view taken along the line IV--IV in FIG. 7, and FIG. 9 is a sectional view of a main part showing a modification of the present invention. 2...Transferred object (semiconductor wafer), 6,6.
...Conveyor belt, m, m...Opposing tapered surface. -t (' s-7%1 ”-

Claims

[Scope of utility model registration request]

In a device for conveying an object by placing it on two conveyor belts that face each other in parallel and move in the same axial direction, each opposing surface of the two conveyor belts is formed into a tapered surface that spreads upward. A conveyance device characterized in that an object to be conveyed is placed and conveyed on this opposing tapered surface with only the opposite edges of the back surface in contact with each other.