JPS61105322U - - Google Patents
Info
- Publication number
- JPS61105322U JPS61105322U JP18981084U JP18981084U JPS61105322U JP S61105322 U JPS61105322 U JP S61105322U JP 18981084 U JP18981084 U JP 18981084U JP 18981084 U JP18981084 U JP 18981084U JP S61105322 U JPS61105322 U JP S61105322U
- Authority
- JP
- Japan
- Prior art keywords
- substrates
- belt conveyor
- conveying
- belt
- orthogonal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims 1
Landscapes
- Relays Between Conveyors (AREA)
- Warehouses Or Storage Devices (AREA)
- De-Stacking Of Articles (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案による基板搬送装置の一実施例
を示す概略平面図である。第２図は第１のベルト
コンベアと第２のベルトコンベアとの直交個所を
マガジンとともに示す概略側面図であり、一部断
面をとつてある。第３図は本考案による基板搬送
装置における移動手段の一実施例を示す概略側面
図であり、一部断面をとつてある。第４図は本考
案による基板搬送装置における移送手段のもうひ
とつの実施例を示す概略側面図であり、一部断面
をとつてある。第５図は第１のベルトコンベアと
、第２のベルトコンベアの直交個所をマガジンと
ともに示す概略平面図である。第６図は従来の基
板搬送装置の一例を示す概略平面図である。
１……炉内ベルトコンベア、２……基板、１１
，１２……マガジン、１３，１４……第１のベル
トコンベア、１５，１６……第２のベルトコンベ
ア、１７……丸ベルト、２０，２９……移送手段
。
FIG. 1 is a schematic plan view showing an embodiment of a substrate transfer device according to the present invention. FIG. 2 is a schematic side view showing the orthogonal point of the first belt conveyor and the second belt conveyor together with the magazine, with a part cut away. FIG. 3 is a schematic side view showing an embodiment of the moving means in the substrate transport apparatus according to the present invention, with a portion thereof being partially cut away. FIG. 4 is a schematic side view showing another embodiment of the transfer means in the substrate transfer apparatus according to the present invention, with a portion thereof being cut away. FIG. 5 is a schematic plan view showing the orthogonal locations of the first belt conveyor and the second belt conveyor together with the magazine. FIG. 6 is a schematic plan view showing an example of a conventional substrate transfer device. 1...Furnace belt conveyor, 2...Substrate, 11
, 12... Magazine, 13, 14... First belt conveyor, 15, 16... Second belt conveyor, 17... Round belt, 20, 29... Transfer means.
Claims (1)
板搬送用の第１のベルトコンベアと、該第１のベ
ルトコンベアに直交する基板搬送用の第２のベル
トコンベアと、該第２のベルトコンベアとその側
部に隣接する炉内ベルトコンベアとの間で複数枚
の基板を一時に受渡すための移送手段とを備えて
なり、前記第１および第２のベルトコンベアは、
少なくとも一方が一対の丸ベルトを有し、互いに
直交する個所で基板の受渡しが可能なように組合
されている、角型膜集積回路基板搬送装置。 a first belt conveyor for conveying substrates, one end of which extends to a magazine for storing substrates; a second belt conveyor for conveying substrates that is orthogonal to the first belt conveyor; a transfer means for transferring a plurality of substrates at once between an in-furnace belt conveyor adjacent to the side thereof, the first and second belt conveyors:
A rectangular membrane integrated circuit board conveying device, at least one of which has a pair of round belts, which are combined so that substrates can be delivered at mutually orthogonal locations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18981084U JPS61105322U (en) | 1984-12-14 | 1984-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18981084U JPS61105322U (en) | 1984-12-14 | 1984-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61105322U true JPS61105322U (en) | 1986-07-04 |
Family
ID=30747258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18981084U Pending JPS61105322U (en) | 1984-12-14 | 1984-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105322U (en) |
-
1984
- 1984-12-14 JP JP18981084U patent/JPS61105322U/ja active Pending
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