JPS5936241U - semiconductor manufacturing equipment - Google Patents

semiconductor manufacturing equipment

Info

Publication number
JPS5936241U
JPS5936241U JP13194082U JP13194082U JPS5936241U JP S5936241 U JPS5936241 U JP S5936241U JP 13194082 U JP13194082 U JP 13194082U JP 13194082 U JP13194082 U JP 13194082U JP S5936241 U JPS5936241 U JP S5936241U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
turntable
air bearing
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13194082U
Other languages
Japanese (ja)
Inventor
毛利 幹生
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP13194082U priority Critical patent/JPS5936241U/en
Publication of JPS5936241U publication Critical patent/JPS5936241U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の半導体製造装置の一例を示す側断面図、
第2図は本考案の一実施例を示す要部の部分断面側面図
である。 6・・・ターンテーブル、12・・・半導体ウェーハ、
16・・・回転軸、18. 19. 20・・・エアー
ベアリング。
FIG. 1 is a side sectional view showing an example of conventional semiconductor manufacturing equipment;
FIG. 2 is a partially sectional side view of the main parts showing an embodiment of the present invention. 6... Turntable, 12... Semiconductor wafer,
16...rotating shaft, 18. 19. 20...Air bearing.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 所定のガス雰囲気内で被熱処理物である半導体つ仝−ハ
を載置するターンテーブルの回転軸をエアーベアリング
で回転自在に保持したことを特徴とする半導体製造装置
1. A semiconductor manufacturing apparatus characterized in that a rotary shaft of a turntable on which a semiconductor component to be heat-treated is mounted in a predetermined gas atmosphere is rotatably held by an air bearing.
JP13194082U 1982-08-30 1982-08-30 semiconductor manufacturing equipment Pending JPS5936241U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13194082U JPS5936241U (en) 1982-08-30 1982-08-30 semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13194082U JPS5936241U (en) 1982-08-30 1982-08-30 semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JPS5936241U true JPS5936241U (en) 1984-03-07

Family

ID=30298125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13194082U Pending JPS5936241U (en) 1982-08-30 1982-08-30 semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5936241U (en)

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