JPS5936241U - semiconductor manufacturing equipment - Google Patents
semiconductor manufacturing equipmentInfo
- Publication number
- JPS5936241U JPS5936241U JP13194082U JP13194082U JPS5936241U JP S5936241 U JPS5936241 U JP S5936241U JP 13194082 U JP13194082 U JP 13194082U JP 13194082 U JP13194082 U JP 13194082U JP S5936241 U JPS5936241 U JP S5936241U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- turntable
- air bearing
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の半導体製造装置の一例を示す側断面図、
第2図は本考案の一実施例を示す要部の部分断面側面図
である。
6・・・ターンテーブル、12・・・半導体ウェーハ、
16・・・回転軸、18. 19. 20・・・エアー
ベアリング。FIG. 1 is a side sectional view showing an example of conventional semiconductor manufacturing equipment;
FIG. 2 is a partially sectional side view of the main parts showing an embodiment of the present invention. 6... Turntable, 12... Semiconductor wafer,
16...rotating shaft, 18. 19. 20...Air bearing.
Claims (1)
を載置するターンテーブルの回転軸をエアーベアリング
で回転自在に保持したことを特徴とする半導体製造装置
。1. A semiconductor manufacturing apparatus characterized in that a rotary shaft of a turntable on which a semiconductor component to be heat-treated is mounted in a predetermined gas atmosphere is rotatably held by an air bearing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13194082U JPS5936241U (en) | 1982-08-30 | 1982-08-30 | semiconductor manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13194082U JPS5936241U (en) | 1982-08-30 | 1982-08-30 | semiconductor manufacturing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5936241U true JPS5936241U (en) | 1984-03-07 |
Family
ID=30298125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13194082U Pending JPS5936241U (en) | 1982-08-30 | 1982-08-30 | semiconductor manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5936241U (en) |
-
1982
- 1982-08-30 JP JP13194082U patent/JPS5936241U/en active Pending
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