JPS58144841U - semiconductor manufacturing equipment - Google Patents
semiconductor manufacturing equipmentInfo
- Publication number
- JPS58144841U JPS58144841U JP4297182U JP4297182U JPS58144841U JP S58144841 U JPS58144841 U JP S58144841U JP 4297182 U JP4297182 U JP 4297182U JP 4297182 U JP4297182 U JP 4297182U JP S58144841 U JPS58144841 U JP S58144841U
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing equipment
- semiconductor manufacturing
- semiconductor wafer
- tray
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図と第３図及び第４図は従来の半導体製
造装置（ＣＶＤ装置）の二側を示す概略側面図及び部分
平面図、第５図及び第６図は本考案の一実施例を示す概
略部分側面図及び部分平面図、第７図はトレー断面図、
第８図は第６図のウェーハ供給機構とトレーの配管図、
第９図及び第１０図は本考案実施例の異なる要部での概
略部分側面図及び部分平面図、第１１図及び第１２図は
一トレーの変形例を示す平面図及びＴ−Ｔ線断面図、第
１３図は第１１図トレー内部の配管図である。
４・・・・・・半導体ウェーハ、１５・・・・・・トレ
ー、１８゜１８ａ、 １８ｂ−−−−−−ｆ−７−吹
出口、１９，１９ａ。
１９ｂ・・・・・・エアー吸引口、３４・・・トレー、
３５゜３６．３７．３８・・・・・・エアー吹出口、３
９．４０・・・・・・エアー吸引口。1, 2, 3 and 4 are schematic side views and partial plan views showing two sides of a conventional semiconductor manufacturing device (CVD device), and FIGS. A schematic partial side view and a partial plan view showing the embodiment, FIG. 7 is a sectional view of the tray,
Figure 8 is a piping diagram of the wafer supply mechanism and tray in Figure 6;
9 and 10 are schematic partial side views and partial plan views of different essential parts of the embodiment of the present invention, and FIGS. 11 and 12 are plan views and cross sections taken along the line T-T of a modified example of one tray. 13 is a piping diagram inside the tray shown in FIG. 11. 4...Semiconductor wafer, 15...Tray, 18° 18a, 18b---F-7-Blowout port, 19, 19a. 19b... Air suction port, 34... Tray,
35゜36.37.38... Air outlet, 3
9.40...Air suction port.
Claims (1)
表面を熱処理する装置において、前記トレー上に半導体
ウェーハの供給及び取出し用のエアー吹出口と、半導体
ウェーハ位置決め用のエアー吸引口を設けたことを特徴
とする半導体製造装置。In an apparatus for heat-treating the surface of a semiconductor wafer by placing a semiconductor wafer on a tray, an air outlet for supplying and taking out the semiconductor wafer and an air suction port for positioning the semiconductor wafer are provided on the tray. Features of semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4297182U JPS58144841U (en) | 1982-03-25 | 1982-03-25 | semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4297182U JPS58144841U (en) | 1982-03-25 | 1982-03-25 | semiconductor manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144841U true JPS58144841U (en) | 1983-09-29 |
| JPS6223087Y2 JPS6223087Y2 (en) | 1987-06-12 |
Family
ID=30054069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4297182U Granted JPS58144841U (en) | 1982-03-25 | 1982-03-25 | semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144841U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194376A (en) * | 2008-01-16 | 2009-08-27 | Semiconductor Energy Lab Co Ltd | Semiconductor substrate manufacturing apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5121474A (en) * | 1974-08-15 | 1976-02-20 | Mitsubishi Electric Corp | HANDOTAIUE HATORIATSUKAISOCHI |
-
1982
- 1982-03-25 JP JP4297182U patent/JPS58144841U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5121474A (en) * | 1974-08-15 | 1976-02-20 | Mitsubishi Electric Corp | HANDOTAIUE HATORIATSUKAISOCHI |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194376A (en) * | 2008-01-16 | 2009-08-27 | Semiconductor Energy Lab Co Ltd | Semiconductor substrate manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223087Y2 (en) | 1987-06-12 |
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