JPS6016544U - semiconductor manufacturing equipment - Google Patents
semiconductor manufacturing equipmentInfo
- Publication number
- JPS6016544U JPS6016544U JP10806583U JP10806583U JPS6016544U JP S6016544 U JPS6016544 U JP S6016544U JP 10806583 U JP10806583 U JP 10806583U JP 10806583 U JP10806583 U JP 10806583U JP S6016544 U JPS6016544 U JP S6016544U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- stage
- suction ports
- independent suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は半導体ウェーハダイシング装置の概
略正面図及び平面図、第３図乃至第８図は半導体ウェー
ハ吸着装置の従来二側を示す各ステージ平面図とＡ−Ａ
線、Ｂ−Ｂ線、Ｃ−Ｃ線断面図、第９図乃至第１２図は
本考案の第１実施例を示すステージ平面図及びＤ−Ｄ線
、Ｅ−Ｅ線断面図、第１３図は本考案の第１実施例の応
用例を示す断面図、第１４図及び第１５図は本考案の第
２、第３実施例を示すステージ平面図、第１６図は第１
３図の変形例を示す断面図である。
２．２′・・・・・・半導体ウェーハ、１０・・・・・
・ステージ、１１．１１’・・・・・・吸着口、１２．
１２’・・・・・・減圧系（真空系）、１８・・・・・
・ステージ、１９゜１９’、２１．２２・・・・・・吸
着口、２３・・・・・・減圧系（真空系）。1 and 2 are a schematic front view and a plan view of a semiconductor wafer dicing device, and FIGS. 3 to 8 are plan views of each stage showing the conventional two sides of a semiconductor wafer suction device, and A-A.
9 to 12 are stage plan views showing the first embodiment of the present invention, sectional views taken along lines D-D and E-E, and FIG. 13. 14 and 15 are stage plan views showing the second and third embodiments of the present invention, and FIG. 16 is a sectional view showing an application example of the first embodiment of the present invention.
FIG. 4 is a sectional view showing a modification of FIG. 3; 2.2'...Semiconductor wafer, 10...
・Stage, 11.11'...Suction port, 12.
12'...Reducing pressure system (vacuum system), 18...
・Stage, 19°19', 21.22... Suction port, 23... Decompression system (vacuum system).
Claims (1)
設けたステージと、当該ステージの前記独立した吸着口
にそれぞれ独立して接続した減圧系とを具備したことを
特徴とする半導体製造装置。1. A semiconductor manufacturing apparatus comprising: a stage having a plurality of independent suction ports for suctioning semiconductor wafers on its upper surface; and a depressurization system independently connected to each of the independent suction ports of the stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10806583U JPS6016544U (en) | 1983-07-11 | 1983-07-11 | semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10806583U JPS6016544U (en) | 1983-07-11 | 1983-07-11 | semiconductor manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6016544U true JPS6016544U (en) | 1985-02-04 |
Family
ID=30252267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10806583U Pending JPS6016544U (en) | 1983-07-11 | 1983-07-11 | semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02504501A (en) * | 1987-08-14 | 1990-12-20 | イーストマン・コダック・カンパニー | container adapter |
-
1983
- 1983-07-11 JP JP10806583U patent/JPS6016544U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02504501A (en) * | 1987-08-14 | 1990-12-20 | イーストマン・コダック・カンパニー | container adapter |
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