JPS62136432U - - Google Patents
Info
- Publication number
- JPS62136432U JPS62136432U JP15057986U JP15057986U JPS62136432U JP S62136432 U JPS62136432 U JP S62136432U JP 15057986 U JP15057986 U JP 15057986U JP 15057986 U JP15057986 U JP 15057986U JP S62136432 U JPS62136432 U JP S62136432U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- cassette
- grooves
- held
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の一実施例を示す断面図である
。
なお図において、１…カセツト、２，３，４，
５…テフロンストツパ、６…角形基板、７…対角
線、８…アーム、である。
FIG. 1 is a sectional view showing an embodiment of the present invention. In the figure, 1...cassette, 2, 3, 4,
5... Teflon stopper, 6... Square substrate, 7... Diagonal line, 8... Arm.
Claims (1)
箱状筐体の対向する二側面の各々内面に溝が設け
られ、この溝に半導体ウエハが差し込まれて保持
される半導体ウエハ保持用のカセツトと、このカ
セツト内に保持された半導体ウエハを下方から嵌
合させて上記半導体ウエハの加工部へ移送する平
板状アームとを具備してなることを特徴とする半
導体ウエハ加工装置。 A cassette for holding semiconductor wafers, in which grooves are provided on the inner surfaces of each of two opposing sides of a box-like housing having upper and lower semiconductor wafer ejection holes, and semiconductor wafers are inserted into the grooves and held; 1. A semiconductor wafer processing apparatus comprising a flat arm that fits a semiconductor wafer held in a cassette from below and transfers the semiconductor wafer to a processing section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057986U JPS62136432U (en) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15057986U JPS62136432U (en) | 1986-09-30 | 1986-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62136432U true JPS62136432U (en) | 1987-08-27 |
Family
ID=31066849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15057986U Pending JPS62136432U (en) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136432U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50125462A (en) * | 1974-03-20 | 1975-10-02 |
-
1986
- 1986-09-30 JP JP15057986U patent/JPS62136432U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50125462A (en) * | 1974-03-20 | 1975-10-02 |
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