JPS6380848U - - Google Patents
Info
- Publication number
- JPS6380848U JPS6380848U JP17561486U JP17561486U JPS6380848U JP S6380848 U JPS6380848 U JP S6380848U JP 17561486 U JP17561486 U JP 17561486U JP 17561486 U JP17561486 U JP 17561486U JP S6380848 U JPS6380848 U JP S6380848U
- Authority
- JP
- Japan
- Prior art keywords
- case
- wafers
- grooves
- held
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はこの考案の一実施例を示す要部の側面
図、第２図は従来のウエハケースの一部を示す側
面図である。
図中、１は半導体ウエハ、２はウエハケース、
４は凸形の突起、５は溝である。尚、図中同一符
号は同一又は相当部分を示す。
FIG. 1 is a side view of essential parts showing an embodiment of this invention, and FIG. 2 is a side view showing a part of a conventional wafer case. In the figure, 1 is a semiconductor wafer, 2 is a wafer case,
4 is a convex projection, and 5 is a groove. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
ス内面の両側にほぼ凸形の突起を対称的に適宜間
隔をあけて列設し、その間の溝にウエハを挿入し
て面接触の状態で保持するようにしてなるウエハ
ケース。 In a case for storing semiconductor wafers, substantially convex protrusions are arranged symmetrically on both sides of the inner surface of the case at appropriate intervals, and the wafers are inserted into the grooves between them and held in surface contact. A wafer case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17561486U JPS6380848U (en) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17561486U JPS6380848U (en) | 1986-11-14 | 1986-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6380848U true JPS6380848U (en) | 1988-05-27 |
Family
ID=31115104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17561486U Pending JPS6380848U (en) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380848U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0626263U (en) * | 1992-08-31 | 1994-04-08 | 株式会社柿崎製作所 | Support container for thin plates |
-
1986
- 1986-11-14 JP JP17561486U patent/JPS6380848U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0626263U (en) * | 1992-08-31 | 1994-04-08 | 株式会社柿崎製作所 | Support container for thin plates |