JPH0345645U - - Google Patents
Info
- Publication number
- JPH0345645U JPH0345645U JP10684089U JP10684089U JPH0345645U JP H0345645 U JPH0345645 U JP H0345645U JP 10684089 U JP10684089 U JP 10684089U JP 10684089 U JP10684089 U JP 10684089U JP H0345645 U JPH0345645 U JP H0345645U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- shock
- storing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は、この考案の一実施例を示すウエーハ
キヤリアの斜視図である。第２図は同キヤリアの
脚部分の拡大側面図である。第３図は、従来のウ
エーハキヤリアの斜視図である。第４図は同キヤ
リアの脚部分の拡大側面図である。
１……ウエーハ、１ａ……周縁部、２……溝、
３……脚部、４……衝撃緩和弾性部。
FIG. 1 is a perspective view of a wafer carrier showing an embodiment of this invention. FIG. 2 is an enlarged side view of the leg portion of the carrier. FIG. 3 is a perspective view of a conventional wafer carrier. FIG. 4 is an enlarged side view of the leg portion of the carrier. 1... Wafer, 1a... Periphery, 2... Groove,
3...Leg portion, 4...Shock-mitigating elastic portion.
Claims (1)
キヤリアの脚部の少なくとも一部に、衝撃緩和弾
性部を設けたことを特徴とする半導体ウエーハキ
ヤリア。 A semiconductor wafer carrier characterized in that a shock-reducing elastic part is provided on at least a part of a leg part of the wafer carrier for storing a wafer by inserting it into an insertion groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10684089U JPH0345645U (en) | 1989-09-12 | 1989-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10684089U JPH0345645U (en) | 1989-09-12 | 1989-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345645U true JPH0345645U (en) | 1991-04-26 |
Family
ID=31655560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10684089U Pending JPH0345645U (en) | 1989-09-12 | 1989-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345645U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999040623A1 (en) * | 1998-02-04 | 1999-08-12 | Nikon Corporation | Exposure system and apparatus for positioning substrate storing cassette |
-
1989
- 1989-09-12 JP JP10684089U patent/JPH0345645U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999040623A1 (en) * | 1998-02-04 | 1999-08-12 | Nikon Corporation | Exposure system and apparatus for positioning substrate storing cassette |