JPH01116444U - - Google Patents
Info
- Publication number
- JPH01116444U JPH01116444U JP1247988U JP1247988U JPH01116444U JP H01116444 U JPH01116444 U JP H01116444U JP 1247988 U JP1247988 U JP 1247988U JP 1247988 U JP1247988 U JP 1247988U JP H01116444 U JPH01116444 U JP H01116444U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- end portion
- semiconductor processing
- semiconductor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
Description
第１図は本考案に係る半導体ウエハキヤリアの
実施例を示す斜視図、第２図は従来用いられてい
る半導体ウエハキヤリアの斜視図を示す。
１……半導体ウエハキヤリア、２，３……キヤ
リア上枠、４，５……突起、６，７……溝、１１
……半導体ウエハキヤリア、１２，１５……キヤ
リア上枠、１３，１６……突起、１４，１７……
溝。
FIG. 1 is a perspective view showing an embodiment of a semiconductor wafer carrier according to the present invention, and FIG. 2 is a perspective view of a conventional semiconductor wafer carrier. 1... Semiconductor wafer carrier, 2, 3... Carrier upper frame, 4, 5... Protrusion, 6, 7... Groove, 11
...Semiconductor wafer carrier, 12,15...Carrier upper frame, 13,16...Protrusion, 14,17...
groove.
Claims (1)
ハ挿入部である上端部において、前記上端部の四
隅の対角状に突起部分あるいは溝部分を設けたこ
とを特徴とするウエハキヤリア。 A wafer carrier for semiconductor processing, characterized in that an upper end portion, which is a semiconductor wafer insertion portion, of the wafer carrier for semiconductor processing is provided with protruding portions or groove portions diagonally at four corners of the upper end portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247988U JPH01116444U (en) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247988U JPH01116444U (en) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116444U true JPH01116444U (en) | 1989-08-07 |
Family
ID=31221952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1247988U Pending JPH01116444U (en) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116444U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117610A (en) * | 1983-11-30 | 1985-06-25 | Kakizaki Seisakusho:Kk | Basket for wafer |
-
1988
- 1988-02-01 JP JP1247988U patent/JPH01116444U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117610A (en) * | 1983-11-30 | 1985-06-25 | Kakizaki Seisakusho:Kk | Basket for wafer |