JPH0313741U - - Google Patents
Info
- Publication number
- JPH0313741U JPH0313741U JP7526989U JP7526989U JPH0313741U JP H0313741 U JPH0313741 U JP H0313741U JP 7526989 U JP7526989 U JP 7526989U JP 7526989 U JP7526989 U JP 7526989U JP H0313741 U JPH0313741 U JP H0313741U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- inspection
- utility
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はこの考案の一実施例によるウエハカセ
ツトを示す断面側面図、第２図は第１図の上面図
、第３図はこの考案の他の実施例を示すウエハカ
セツトの断面側面図、第４図は第３図の上面図、
第５図は従来のウエハカセツトを示す斜視図であ
る。
図において、３はウエハ、４はウエハカセツト
を示す。なお、図中、同一符号は同一、または相
当部分を示す。
FIG. 1 is a cross-sectional side view showing a wafer cassette according to one embodiment of this invention, FIG. 2 is a top view of FIG. 1, and FIG. 3 is a cross-sectional side view of a wafer cassette showing another embodiment of this invention. Figure 4 is a top view of Figure 3;
FIG. 5 is a perspective view of a conventional wafer cassette. In the figure, 3 indicates a wafer and 4 indicates a wafer cassette. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
セツトを枚葉式とし、カセツトを取り付けたまま
検査等の処理ができるようにしたことを特徴とす
るウエハカセツト。 A wafer cassette for transporting wafers, characterized in that the cassette is a single-wafer type, and processing such as inspection can be performed with the cassette attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526989U JPH0313741U (en) | 1989-06-27 | 1989-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7526989U JPH0313741U (en) | 1989-06-27 | 1989-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313741U true JPH0313741U (en) | 1991-02-12 |
Family
ID=31615702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7526989U Pending JPH0313741U (en) | 1989-06-27 | 1989-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313741U (en) |
-
1989
- 1989-06-27 JP JP7526989U patent/JPH0313741U/ja active Pending