JPH0352071U - - Google Patents
Info
- Publication number
- JPH0352071U JPH0352071U JP11390689U JP11390689U JPH0352071U JP H0352071 U JPH0352071 U JP H0352071U JP 11390689 U JP11390689 U JP 11390689U JP 11390689 U JP11390689 U JP 11390689U JP H0352071 U JPH0352071 U JP H0352071U
- Authority
- JP
- Japan
- Prior art keywords
- contact
- tweezers
- contact part
- connects
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims description 3
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本考案の半導体ウエハー処理用ピンセ
ツトの全体図である。
１１……接触部、１２……操作部、１３……支
点部。
第２図は第１図の１１接触部の拡大図で、それ
ぞれａ……平面図、ｂ……正面図、ｃ……側面図
である。
FIG. 1 is an overall view of the tweezers for processing semiconductor wafers of the present invention. 11... Contact portion, 12... Operating portion, 13... Fulcrum portion. FIG. 2 is an enlarged view of the 11 contact portions in FIG. 1, and is a plan view, b a front view, and a side view, respectively.
Claims (1)
に接触する接触部分と、操作部分と前記接触部分
との間の位置で交差接続する支点部とを有するこ
とを特徴とする半導体ウエハー処理用ピンセツト
。 A tweezers for processing semiconductor wafers, characterized by having a contact part that makes wide contact with the semiconductor wafer from both the front and back sides, and a fulcrum part that cross-connects at a position between the operating part and the contact part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11390689U JPH0352071U (en) | 1989-09-27 | 1989-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11390689U JPH0352071U (en) | 1989-09-27 | 1989-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0352071U true JPH0352071U (en) | 1991-05-21 |
Family
ID=31662300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11390689U Pending JPH0352071U (en) | 1989-09-27 | 1989-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0352071U (en) |
-
1989
- 1989-09-27 JP JP11390689U patent/JPH0352071U/ja active Pending
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