JPS61151865U - - Google Patents
Info
- Publication number
- JPS61151865U JPS61151865U JP3440885U JP3440885U JPS61151865U JP S61151865 U JPS61151865 U JP S61151865U JP 3440885 U JP3440885 U JP 3440885U JP 3440885 U JP3440885 U JP 3440885U JP S61151865 U JPS61151865 U JP S61151865U
- Authority
- JP
- Japan
- Prior art keywords
- contact portion
- semiconductor wafer
- held
- tweezers
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本考案によるピンセツトの一実施例の
斜視図である。第２図ａ，ｂは従来のピンセツト
の平面図と側面図である。
１，１０……ピンセツト、１０ａ，１０ｂ……
接触部、１０ｄ……ストツパー、１０ｃ……穴、
２，１１……半導体ウエハーである。
FIG. 1 is a perspective view of an embodiment of the tweezers according to the present invention. Figures 2a and 2b are a plan view and a side view of a conventional tweezers. 1, 10...tweezers, 10a, 10b...
Contact part, 10d... Stopper, 10c... Hole,
2, 11... Semiconductor wafer.
Claims (1)
部と、前記第１の接触部と反対側の該保持する半
導体ウエハーの他方の面に接触する第２の接触部
とを有するピンセツトにおいて、前記第１および
第２の接触部の近くにストツパーが設けられてお
り、これにより前記保持する半導体ウエハーの表
裏への接触範囲を周辺部の小さな箇所に特定出来
ることを特徴としたピンセツト。 In the tweezers, the tweezers have a first contact portion that connects to a semiconductor wafer to be held, and a second contact portion that contacts the other surface of the semiconductor wafer to be held, which is opposite to the first contact portion. and a stopper is provided near the second contact portion, whereby the range of contact with the front and back sides of the held semiconductor wafer can be specified to a small area on the periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440885U JPS61151865U (en) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440885U JPS61151865U (en) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151865U true JPS61151865U (en) | 1986-09-19 |
Family
ID=30537746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3440885U Pending JPS61151865U (en) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151865U (en) |
-
1985
- 1985-03-11 JP JP3440885U patent/JPS61151865U/ja active Pending