JPS6135748U - Tweezers for semiconductor wafers - Google Patents

Tweezers for semiconductor wafers

Info

Publication number
JPS6135748U
JPS6135748U JP12106384U JP12106384U JPS6135748U JP S6135748 U JPS6135748 U JP S6135748U JP 12106384 U JP12106384 U JP 12106384U JP 12106384 U JP12106384 U JP 12106384U JP S6135748 U JPS6135748 U JP S6135748U
Authority
JP
Japan
Prior art keywords
tweezers
semiconductor wafers
parts
semiconductor
angle formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12106384U
Other languages
Japanese (ja)
Inventor
忠 西郡
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP12106384U priority Critical patent/JPS6135748U/en
Publication of JPS6135748U publication Critical patent/JPS6135748U/en
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のウエハー用のピンセットの斜視図、第２
図は本考案にかかる一実施例の斜視図である。 １０・・・・・・握りの部分、２０・・・・・・ウエハ
ーの表側を支える部分、３０・・・・・・ウエハーの裏
側を支える部分、４０・・・・・・ストッパー、１１０
・・・・・・握りの部分、１２０・・・・・・ウェハー
の表側を支える部分、１３０・・・・・・ウエハーの裏
側を支える部分、１４０・・・・・・ストッパー、１５
０・・・・・・１３０の部分のなす角度。Figure 1 is a perspective view of conventional wafer tweezers, Figure 2 is a perspective view of conventional wafer tweezers.
The figure is a perspective view of an embodiment of the present invention. 10... Grip part, 20... Part that supports the front side of the wafer, 30... Part that supports the back side of the wafer, 40... Stopper, 110
...Grip part, 120...Part that supports the front side of the wafer, 130...Part that supports the back side of the wafer, 140...Stopper, 15
The angle formed by the 0...130 part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウエハーの一方の側を支える部分が■字形に２本
突き出しており、それらのなす角を可変にしたことを特
徴とする半導体ウエハー用ピンセット。Tweezers for semiconductor wafers, characterized in that two parts supporting one side of the semiconductor wafer protrude in a ■-shape, and the angle formed by these parts is variable.
JP12106384U 1984-08-07 1984-08-07 Tweezers for semiconductor wafers Pending JPS6135748U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12106384U JPS6135748U (en) 1984-08-07 1984-08-07 Tweezers for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12106384U JPS6135748U (en) 1984-08-07 1984-08-07 Tweezers for semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS6135748U true JPS6135748U (en) 1986-03-05

Family

ID=30679858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12106384U Pending JPS6135748U (en) 1984-08-07 1984-08-07 Tweezers for semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS6135748U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312589A (en) * 1987-06-15 1988-12-21 Yamada Yuki Seizo Kk Spool type directional control valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312589A (en) * 1987-06-15 1988-12-21 Yamada Yuki Seizo Kk Spool type directional control valve

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