JPS60133630U - wafer holder - Google Patents
wafer holderInfo
- Publication number
- JPS60133630U JPS60133630U JP1936084U JP1936084U JPS60133630U JP S60133630 U JPS60133630 U JP S60133630U JP 1936084 U JP1936084 U JP 1936084U JP 1936084 U JP1936084 U JP 1936084U JP S60133630 U JPS60133630 U JP S60133630U
- Authority
- JP
- Japan
- Prior art keywords
- wafer holder
- wafer
- grooves
- groove
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
′ １ 第１図はこの考案の実施例を示し、ウェハ
ホルダを用いたウェハ突上げ装置の斜視図、第２図は従
来のウェハホルダを示し、ウェハホルダを設けた押上げ
板の斜視図、第３図はこの考案の実施例を示し、ウェハ
ホルダを設けた押上げ板め部分正面図、第４図は１図の
ＩＶ−ＩＶ線矢視図である。 。
９１・・・溝、′２・・・間隔、・４・・・本体。' 1 Figure 1 shows an embodiment of this invention, and is a perspective view of a wafer lifting device using a wafer holder. Figure 2 shows a conventional wafer holder, and Figure 3 is a perspective view of a lifting plate equipped with a wafer holder. 4 shows an embodiment of this invention, and is a partial front view of a push-up plate provided with a wafer holder, and FIG. 4 is a view taken along the line IV--IV in FIG. 1. . 91...groove, '2...interval, 4...main body.
Claims (1)
各溝をそれぞれ共通の一つの平面を含むように形成し、
かっ該各溝間に間隔を隔てさせたことを特徴とするウェ
ハホルダ。 、 −At least three grooves for accommodating the wafer are provided in two parts, each groove being formed to include a common plane,
A wafer holder characterized in that the grooves are spaced apart from each other. , −
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1936084U JPS60133630U (en) | 1984-02-14 | 1984-02-14 | wafer holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1936084U JPS60133630U (en) | 1984-02-14 | 1984-02-14 | wafer holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60133630U true JPS60133630U (en) | 1985-09-06 |
Family
ID=30508862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1936084U Pending JPS60133630U (en) | 1984-02-14 | 1984-02-14 | wafer holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133630U (en) |
-
1984
- 1984-02-14 JP JP1936084U patent/JPS60133630U/en active Pending
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